Inventor · disambiguated record
Tian Gang
Also filed as: GANG TIAN
4 granted patents·2 pending applications·5 citations·filing 2018–2025
62Inventor score
Top patents by PatentIndex Score
6 records- 0187US11656555B2Lithographic apparatus and illumination uniformity correction systemASML HOLDING NV·Filed 2020·Granted May 23, 2023·3 cites·20 claims
- 0282US2025306453A1Optimization using a non-uniform illumination intensity profileASML HOLDING NV·Filed 2025·Application pending·0 cites
- 0372US10845706B2Mirror arrayASML NETHERLANDS BV·Filed 2018·Granted Nov 24, 2020·2 cites·21 claims
- 0469US12339583B2Optimization using a non-uniform illumination intensity profileASML HOLDING NV·Filed 2020·Granted Jun 24, 2025·0 cites·20 claims
- 0556US11327403B2Illumination optical system for projection lithographyZEISS CARL SMT GMBH·Filed 2021·Granted May 10, 2022·0 cites·20 claims
- 0648US2023035511A1Lithographic apparatus and method for drift compensationASML NETHERLANDS BV·Filed 2021·Application pending·0 cites
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Identity basis: PatentsView inventor disambiguation (2025Q4-odp release). How scoring works →