Inventor · disambiguated record
Satheesh Kuppurao
Also filed as: KUPPURAO SATHEESH
38 granted patents·14 pending applications·998 citations·filing 1997–2018
98Inventor score
Files withAPPLIED MATERIALS INC39CARLSON DAVID K3KUPPURAO SATHEESH2RANISH JOSEPH M2SANCHEZ ERROL ANTONIO C2
Top patents by PatentIndex Score
52 records- 0198US7955646B2Elimination of flow and pressure gradients in low utilization processesAPPLIED MATERIALS INC·Filed 2004·Granted Jun 7, 2011·381 cites·17 claims
- 0298US7494545B2Epitaxial deposition process and apparatusAPPLIED MATERIALS INC·Filed 2006·Granted Feb 24, 2009·246 cites·10 claims
- 0397US8313804B2Apparatus and methods for chemical vapor depositionCARLSON DAVID K·Filed 2011·Granted Nov 20, 2012·17 cites·18 claims
- 0492US9845550B2Upper dome with injection assemblyAPPLIED MATERIALS INC·Filed 2015·Granted Dec 19, 2017·7 cites·20 claims
- 0592US7967911B2Apparatus and methods for chemical vapor depositionAPPLIED MATERIALS INC·Filed 2007·Granted Jun 28, 2011·12 cites·11 claims
- 0692US6037273AMethod and apparatus for insitu vapor generationAPPLIED MATERIALS INC·Filed 1998·Granted Mar 14, 2000·139 cites·28 claims
- 0791US7976634B2Independent radiant gas preheating for precursor disassociation control and gas reaction kinetics in low temperature CVD systemsAPPLIED MATERIALS INC·Filed 2007·Granted Jul 12, 2011·18 cites·15 claims
- 0890US10202707B2Substrate processing system with lamphead having temperature managementAPPLIED MATERIALS INC·Filed 2013·Granted Feb 12, 2019·4 cites·18 claims
- 0989US9512520B2Semiconductor substrate processing systemSANCHEZ ERROL ANTONIO C·Filed 2012·Granted Dec 6, 2016·9 cites·17 claims
- 1088US8772055B1Multizone control of lamps in a conical lamphead using pyrometersRANISH JOSEPH M·Filed 2013·Granted Jul 8, 2014·6 cites·5 claims
- 1188US8663390B2Independent radiant gas preheating for precursor disassociation control and gas reaction kinetics in low temperature CVD systemsCARLSON DAVID KEITH·Filed 2011·Granted Mar 4, 2014·12 cites·21 claims
- 1288US6159866AMethod for insitu vapor generation for forming an oxide on a substrateAPPLIED MATERIALS INC·Filed 2000·Granted Dec 12, 2000·35 cites·4 claims
- 1387US9322097B2EPI base ringAPPLIED MATERIALS INC·Filed 2013·Granted Apr 26, 2016·7 cites·14 claims
- 1486US7560352B2Selective depositionAPPLIED MATERIALS INC·Filed 2006·Granted Jul 14, 2009·15 cites·34 claims
- 1586US7262116B2Low temperature epitaxial growth of silicon-containing films using close proximity UV radiationAPPLIED MATERIALS INC·Filed 2006·Granted Aug 28, 2007·9 cites·27 claims
- 1684US6410456B1Method and apparatus for insitu vapor generationAPPLIED MATERIALS INC·Filed 2000·Granted Jun 25, 2002·25 cites·16 claims
- 1782US10119192B2EPI base ringAPPLIED MATERIALS INC·Filed 2016·Granted Nov 6, 2018·3 cites·15 claims
- 1882US9768043B2Quartz upper and lower domesAPPLIED MATERIALS INC·Filed 2013·Granted Sep 19, 2017·4 cites·19 claims
- 1982US7709391B2Methods for in-situ generation of reactive etch and growth specie in film formation processesAPPLIED MATERIALS INC·Filed 2006·Granted May 4, 2010·8 cites·20 claims
- 2081US9580835B2Multizone control of lamps in a conical lamphead using pyrometersAPPLIED MATERIALS INC·Filed 2016·Granted Feb 28, 2017·2 cites·9 claims
- 2177US9870919B2Process chamber having separate process gas and purge gas regionsRANISH JOSEPH M·Filed 2013·Granted Jan 16, 2018·3 cites·9 claims
- 2275US10077508B2Multizone control of lamps in a conical lamphead using pyrometersAPPLIED MATERIALS INC·Filed 2017·Granted Sep 18, 2018·1 cites·19 claims
- 2374US10458040B2Upper dome with injection assemblyAPPLIED MATERIALS INC·Filed 2017·Granted Oct 29, 2019·1 cites·20 claims
- 2474US9842753B2Absorbing lamphead faceAPPLIED MATERIALS INC·Filed 2014·Granted Dec 12, 2017·2 cites·20 claims
- 2572US7718225B2Method to control semiconductor film deposition characteristicsAPPLIED MATERIALS INC·Filed 2005·Granted May 18, 2010·3 cites·18 claims
- 2671US9832816B2Absorbing reflector for semiconductor processing chamberAPPLIED MATERIALS INC·Filed 2014·Granted Nov 28, 2017·2 cites·11 claims
- 2771US9230837B2Multizone control of lamps in a conical lamphead using pyrometersAPPLIED MATERIALS INC·Filed 2014·Granted Jan 5, 2016·1 cites·20 claims
- 2871US8813538B2Methods and apparatus for insitu analysis of gases in electronic device fabrication systemsCARLSON DAVID K·Filed 2011·Granted Aug 26, 2014·2 cites·8 claims
- 2968US7770431B2Methods and apparatus for insitu analysis of gases in electronic device fabrication systemsAPPLIED MATERIALS INC·Filed 2007·Granted Aug 10, 2010·3 cites·9 claims
- 3064US7396743B2Low temperature epitaxial growth of silicon-containing films using UV radiationSINGH KAUSHAL K·Filed 2004·Granted Jul 8, 2008·7 cites·21 claims
- 3154US2014345526A1Coated liner assembly for a semiconductor processing chamberAPPLIED MATERIALS INC·Filed 2014·Application pending·0 cites
- 3254US2014345525A1Coated liner assembly for a semiconductor processing chamberAPPLIED MATERIALS INC·Filed 2014·Application pending·0 cites
- 3354US2017362702A9Independent radiant gas preheating for precursor disassociation control and gas reaction kinetics in low temperature cvd systemsAPPLIED MATERIALS INC·Filed 2014·Application pending·0 cites
- 3453US2007232031A1UV assisted low temperature epitaxial growth of silicon-containing filmsAPPLIED MATERIALS INC·Filed 2007·Application pending·0 cites
- 3552US10306708B2Absorbing reflector for semiconductor processing chamberAPPLIED MATERIALS INC·Filed 2017·Granted May 28, 2019·0 cites·20 claims
- 3652US6280790B1Reducing the deposition rate of volatile contaminants onto an optical component of a substrate processing systemAPPLIED MATERIALS INC·Filed 1997·Granted Aug 28, 2001·14 cites·16 claims
- 3752US2018138031A1Process chamber having separate process gas and purge gas regionsAPPLIED MATERIALS INC·Filed 2018·Application pending·0 cites
- 3850US8020427B2Methods and apparatus for insitu analysis of gases in electronic device fabrication systemsAPPLIED MATERIALS INC·Filed 2010·Granted Sep 20, 2011·0 cites·13 claims
- 3950US2018005856A1Quartz upper and lower domesAPPLIED MATERIALS INC·Filed 2017·Application pending·0 cites
- 4049US8991332B2Apparatus to control semiconductor film deposition characteristicsKUPPURAO SATHEESH·Filed 2009·Granted Mar 31, 2015·0 cites·16 claims
- 4148US10224421B2Self-aligned process for sub-10nm fin formationAPPLIED MATERIALS INC·Filed 2018·Granted Mar 5, 2019·0 cites·20 claims
- 4248US2012270384A1Apparatus for deposition of materials on a substrateSANCHEZ ERROL ANTONIO C·Filed 2011·Application pending·0 cites
- 4348US2013105483A1Apparatus for sublimating solid state precursorsCARLSON DAVID K·Filed 2011·Application pending·0 cites
- 4448US2016336205A1Absorbing lamphead faceAPPLIED MATERIALS INC·Filed 2016·Application pending·0 cites
- 4546US10312096B2Methods for titanium silicide formation using TiCl4 precursor and silicon-containing precursorAPPLIED MATERIALS INC·Filed 2017·Granted Jun 4, 2019·0 cites·20 claims
- 4646US2016068959A1Atmospheric epitaxial deposition chamberAPPLIED MATERIALS INC·Filed 2015·Application pending·0 cites
- 4742US9058988B2Methods for depositing layers having reduced interfacial contaminationVATUS JEAN R·Filed 2010·Granted Jun 16, 2015·0 cites·19 claims
- 4841US2016068955A1Honeycomb multi-zone gas distribution plateAPPLIED MATERIALS INC·Filed 2015·Application pending·0 cites
- 4941US2015368830A1One-piece injector assembly and one-piece exhaust linerAPPLIED MATERIALS INC·Filed 2015·Application pending·0 cites
- 5040US2002136831A1Method and apparatus for insitu vapor generationFiled 2002·Application pending·0 cites
Showing the top 50 of 52 patent records by PatentIndex Score.
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