Inventor · disambiguated record
Markus Ulm
Also filed as: ULM MARKUS
22 granted patents·2 pending applications·199 citations·filing 2001–2016
95Inventor score
Top patents by PatentIndex Score
24 records- 0197US7449355B2Anti-stiction technique for electromechanical systems and electromechanical device employing sameBOSCH GMBH ROBERT·Filed 2005·Granted Nov 11, 2008·57 cites·36 claims
- 0292US9003885B2Tri-axis accelerometer having a single proof mass and fully differential output signalsPAN ZHIYU·Filed 2013·Granted Apr 14, 2015·9 cites·23 claims
- 0392US7414351B2Energy harvesting device manufactured by print forming processesBOSCH GMBH ROBERT·Filed 2006·Granted Aug 19, 2008·26 cites·16 claims
- 0491US8020266B2Method of producing a deviceBOSCH GMBH ROBERT·Filed 2008·Granted Sep 20, 2011·23 cites·4 claims
- 0588US7757555B2Tri-axis accelerometer having a single proof mass and fully differential output signalsBOSCH GMBH ROBERT·Filed 2006·Granted Jul 20, 2010·14 cites·10 claims
- 0684US7671515B2Microelectromechanical devices and fabrication methodsBOSCH GMBH ROBERT·Filed 2006·Granted Mar 2, 2010·13 cites·6 claims
- 0782US8418559B2Tri-axis accelerometer having a single proof mass and fully differential output signalsPAN ZHIYU·Filed 2010·Granted Apr 16, 2013·4 cites·14 claims
- 0880US7898046B2Microelectromechanical systems encapsulation processBOSCH GMBH ROBERT·Filed 2009·Granted Mar 1, 2011·5 cites·6 claims
- 0980US7582514B2Microelectromechanical systems encapsulation process with anti-stiction coatingBOSCH GMBH ROBERT·Filed 2007·Granted Sep 1, 2009·9 cites·27 claims
- 1079US7625773B2Anti-stiction technique for electromechanical systems and electromechanical device employing sameBOSCH GMBH ROBERT·Filed 2008·Granted Dec 1, 2009·7 cites·43 claims
- 1179US7563633B2Microelectromechanical systems encapsulation processBOSCH GMBH ROBERT·Filed 2006·Granted Jul 21, 2009·5 cites·21 claims
- 1278US9255000B2CMOS integrated moving-gate transducer with silicon as a functional layerBOSCH GMBH ROBERT·Filed 2013·Granted Feb 9, 2016·2 cites·19 claims
- 1373US8276446B2Sensor deviceULM MARKUS·Filed 2010·Granted Oct 2, 2012·5 cites·14 claims
- 1457US9725298B2CMOS integrated moving-gate transducer with silicon as a functional layerBOSCH GMBH ROBERT·Filed 2016·Granted Aug 8, 2017·0 cites·19 claims
- 1554US7535325B2Component for impedance change in a coplanar waveguide and method for producing a componentBOSCH GMBH ROBERT·Filed 2004·Granted May 19, 2009·5 cites·16 claims
- 1654US7224239B2Structural element having a coplanar lineBOSCH GMBH ROBERT·Filed 2004·Granted May 29, 2007·4 cites·8 claims
- 1752US6686810B2Coplanar waveguide switchBOSCH GMBH ROBERT·Filed 2001·Granted Feb 3, 2004·6 cites·10 claims
- 1849US6882255B2Device having a capacitor with alterable capacitance, in particular a high-frequency microswitchBOSCH GMBH ROBERT·Filed 2001·Granted Apr 19, 2005·5 cites·17 claims
- 1945US8786419B2Method for controlling a device and a device for controlling the deviceULM MARKUS·Filed 2009·Granted Jul 22, 2014·0 cites·7 claims
- 2037US6762923B2Coplanar switchBOSCH GMBH ROBERT·Filed 2001·Granted Jul 13, 2004·0 cites·12 claims
- 2136US7229694B2Micromechanical component and method for producing an anti-adhesive layer on a micromechanical componentBOSCH GMBH ROBERT·Filed 2003·Granted Jun 12, 2007·0 cites·12 claims
- 2235US6876268B2Capacitive finger coupling element on a silicon support for coupling a strip line structureBOSCH GMBH ROBERT·Filed 2002·Granted Apr 5, 2005·0 cites·10 claims
- 2335US2006097388A1Electrical system, especially a microelectronic or microelectromechanical high frequency systemBREITSCHWERDT KLAUS·Filed 2003·Application pending·0 cites
- 2431US2002190699A1Controllable damping member, method of controlling, and system using the damping memberFiled 2002·Application pending·0 cites
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Identity basis: PatentsView inventor disambiguation (2025Q4-odp release). How scoring works →