Inventor · disambiguated record
Yoshichika Tokuno
Also filed as: TOKUNO YOSHICHIKA
2 granted patents·1 pending application·9 citations·filing 2004–2007
51Inventor score
Technology areasH10P
Top patents by PatentIndex Score
3 records- 0171US8133327B2Substrate processing method, storage medium and substrate processing apparatusTOKUNO YOSHICHIKA·Filed 2007·Granted Mar 13, 2012·8 cites·10 claims
- 0245US7767006B2Ozone processing apparatus and ozone processing methodTOKYO ELECTRON LTD·Filed 2004·Granted Aug 3, 2010·1 cites·4 claims
- 0334US2007134822A1Process system, process liquid supply method, and process liquid supply programYAMAMOTO SHU·Filed 2006·Application pending·0 cites
Join the waitlist — get patent alerts
Get an alert when Yoshichika Tokuno files or is granted a new patent.
We store only your email — no account needed. See our privacy policy.
Identity basis: PatentsView inventor disambiguation (2025Q4-odp release). How scoring works →