Inventor · disambiguated record
Andreas Raba
Also filed as: RABA ANDREAS
3 granted patents·6 pending applications·0 citations·filing 2022–2025
39Inventor score
Files withZEISS CARL SMT GMBH9
Top patents by PatentIndex Score
9 records- 0170US2025258444A1Optical system, and method for operating an optical systemZEISS CARL SMT GMBH·Filed 2025·Application pending·0 cites
- 0268US2025264712A1Adaptive mirror with mechanical mediator layer and microlithographic projection exposure apparatusZEISS CARL SMT GMBH·Filed 2025·Application pending·0 cites
- 0367US2025216794A1Mirror device, for example for a microlithographic projection exposure system, and method for measuring the temperature of a mirrorZEISS CARL SMT GMBH·Filed 2025·Application pending·0 cites
- 0467US2025216801A1Mirror device, projection objective and method for measuring the temperature of a mirrorZEISS CARL SMT GMBH·Filed 2025·Application pending·0 cites
- 0566US12372877B2Projection exposure apparatus for semiconductor lithographyZEISS CARL SMT GMBH·Filed 2023·Granted Jul 29, 2025·0 cites·20 claims
- 0665US2025130504A1Optical element and projection exposure apparatus for semiconductor lithographyZEISS CARL SMT GMBH·Filed 2024·Application pending·0 cites
- 0763US2025044711A1Temperature-insensitive actuator and deformation mirrorZEISS CARL SMT GMBH·Filed 2024·Application pending·0 cites
- 0858US12313978B2Optical assembly, projection exposure apparatus and methodZEISS CARL SMT GMBH·Filed 2022·Granted May 27, 2025·0 cites·23 claims
- 0953US12443110B2Optical assembly, method for controlling an optical assembly, and projection exposure apparatusZEISS CARL SMT GMBH·Filed 2023·Granted Oct 14, 2025·0 cites·20 claims
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Identity basis: PatentsView inventor disambiguation (2025Q4-odp release). How scoring works →