Inventor · disambiguated record
Dries Smeets
Also filed as: SMEETS DRIES
3 granted patents·1 citations·filing 2013–2015
47Inventor score
Technology areasG03F
Top patents by PatentIndex Score
3 records- 0163US10690812B2Optical element and optical system for EUV lithography, and method for treating such an optical elementZEISS CARL SMT GMBH·Filed 2015·Granted Jun 23, 2020·1 cites·17 claims
- 0248US9823576B2Radiation modulator for a lithography apparatus, a lithography apparatus, a method of modulating radiation for use in lithography, and a device manufacturing methodASML NETHERLANDS BV·Filed 2014·Granted Nov 21, 2017·0 cites·21 claims
- 0343US9715183B2Device, lithographic apparatus, method for guiding radiation and device manufacturing methodASML NETHERLANDS BV·Filed 2013·Granted Jul 25, 2017·0 cites·20 claims
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Identity basis: PatentsView inventor disambiguation (2025Q4-odp release). How scoring works →