Inventor · disambiguated record
Anbei Jiang
Also filed as: JIANG ANBEI
4 granted patents·1 pending application·148 citations·filing 2001–2012
77Inventor score
Top patents by PatentIndex Score
5 records- 0192US8691023B2Methods and apparatus for cleaning deposition chamber parts using selective spray etchBAO LIYUAN·Filed 2012·Granted Apr 8, 2014·116 cites·10 claims
- 0273US6852242B2Cleaning of multicompositional etchant residuesFiled 2001·Granted Feb 8, 2005·25 cites·15 claims
- 0357US7270761B2Fluorine free integrated process for etching aluminum including chamber dry cleanAPPLEID MATERIALS INC·Filed 2002·Granted Sep 18, 2007·7 cites·34 claims
- 0443US8398779B2Non destructive selective deposition removal of non-metallic deposits from aluminum containing substratesBAO LIYUAN·Filed 2010·Granted Mar 19, 2013·0 cites·8 claims
- 0537US2004200498A1Method and apparatus for cleaning a substrate processing chamberAPPLIED MATERIALS INC·Filed 2003·Application pending·0 cites
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