Inventor · disambiguated record
Yuichi Tachikawa
Also filed as: TACHIKAWA YUICHI
2 granted patents·558 citations·filing 2006–2007
69Inventor score
Files withNUFLARE TECHNOLOGY INC2
Top patents by PatentIndex Score
2 records- 0193US7640142B2Position measurement apparatus and method and pattern forming apparatus and writing methodNUFLARE TECHNOLOGY INC·Filed 2006·Granted Dec 29, 2009·550 cites·19 claims
- 0269US7608528B2Substrate cover, and charged particle beam writing apparatus and methodNUFLARE TECHNOLOGY INC·Filed 2007·Granted Oct 27, 2009·8 cites·10 claims
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Identity basis: PatentsView inventor disambiguation (2025Q4-odp release). How scoring works →