Inventor · disambiguated record
Matthew Egloff
Also filed as: EGLOFF MATTHEW · EGLOFF MATTHEW C
4 granted patents·56 citations·filing 2001–2004
76Inventor score
Technology areasH10P
Files withSEMITOOL INC4
Top patents by PatentIndex Score
4 records- 0188US6773559B2Processing apparatus including a reactor for electrochemically etching a microelectronic workpieceSEMITOOL INC·Filed 2001·Granted Aug 10, 2004·32 cites·12 claims
- 0271US7198694B2Integrated tool with interchangeable wet processing components for processing microfeature workpieces and automated calibration systemsSEMITOOL INC·Filed 2004·Granted Apr 3, 2007·16 cites·29 claims
- 0364US7313462B2Integrated tool with automated calibration system and interchangeable wet processing components for processing microfeature workpiecesSEMITOOL INC·Filed 2004·Granted Dec 25, 2007·8 cites·7 claims
- 0443US7524406B2Processing apparatus including a reactor for electrochemically etching microelectronic workpieceSEMITOOL INC·Filed 2003·Granted Apr 28, 2009·0 cites·15 claims
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Identity basis: PatentsView inventor disambiguation (2025Q4-odp release). How scoring works →