Inventor · disambiguated record

Oleg Tsibulevsky

Also filed as: TSIBULEVSKY OLEG

2 granted patents·12 citations·filing 2013–2016

56Inventor score

Technology areasG02B

Files withKLA TENCOR CORP2

Top patents by PatentIndex Score

2 records

0191US10203247B2Systems for providing illumination in optical metrologyKLA TENCOR CORP·Filed 2016·Granted Feb 12, 2019·10 cites·21 claims
0269US9512985B2Systems for providing illumination in optical metrologyKLA TENCOR CORP·Filed 2013·Granted Dec 6, 2016·2 cites·50 claims

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