Inventor · disambiguated record
Alice Hollister
Also filed as: HOLLISTER ALICE · HOLLISTER ALICE G
6 granted patents·3 pending applications·38 citations·filing 2012–2021
80Inventor score
Top patents by PatentIndex Score
9 records- 0191US9337068B2Oxygen-containing ceramic hard masks and associated wet-cleansLAM RES CORP·Filed 2013·Granted May 10, 2016·13 cites·16 claims
- 0288US9520295B2Metal doping of amorphous carbon and silicon films used as hardmasks in substrate processing systemsLAM RES CORP·Filed 2015·Granted Dec 13, 2016·6 cites·36 claims
- 0387US9320387B2Sulfur doped carbon hard masksLAM RES CORP·Filed 2014·Granted Apr 26, 2016·6 cites·17 claims
- 0483US9117668B2PECVD deposition of smooth silicon filmsHOLLISTER ALICE·Filed 2012·Granted Aug 25, 2015·8 cites·22 claims
- 0576US10242848B2Carrier ring structure and chamber systems including the sameLAM RES CORP·Filed 2014·Granted Mar 26, 2019·5 cites·24 claims
- 0650US12456621B2Inert gas implantation for hard mask selectivity improvementLAM RES CORP·Filed 2021·Granted Oct 28, 2025·0 cites·14 claims
- 0750US2023230820A1Intermittent stagnant flowLAM RES CORP·Filed 2021·Application pending·0 cites
- 0845US2015325435A1Pecvd deposition of smooth silicon filmsNOVELLUS SYSTEMS INC·Filed 2015·Application pending·0 cites
- 0938US2012258261A1Increasing etch selectivity of carbon films with lower absorption co-efficient and stressREDDY SIRISH·Filed 2012·Application pending·0 cites
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Identity basis: PatentsView inventor disambiguation (2025Q4-odp release). How scoring works →