Inventor · disambiguated record
Young-Min Min
Also filed as: MIN YOUNG-MIN
8 granted patents·1 pending application·104 citations·filing 1999–2009
86Inventor score
Top patents by PatentIndex Score
9 records- 0193US7578944B2Apparatus for generating gas plasma, gas composition for generating plasma and method for manufacturing semiconductor device using the sameSAMSUNG ELECTRONICS CO LTD·Filed 2005·Granted Aug 25, 2009·23 cites·11 claims
- 0286US7193369B2Method for generating gas plasmaSAMSUNG ELECTRONICS CO LTD·Filed 2003·Granted Mar 20, 2007·30 cites·25 claims
- 0375US6684652B2Method of and an apparatus for regulating the temperature of an electrostatic chuckSAMSUNG ELECTRONICS CO LTD·Filed 2002·Granted Feb 3, 2004·22 cites·5 claims
- 0473US7764483B2Semiconductor etching apparatusSAMSUNG ELECTRONICS CO LTD·Filed 2007·Granted Jul 27, 2010·4 cites·3 claims
- 0572US6816029B2RF matching unitSAMSUNG ELECTRONICS CO LTD·Filed 2001·Granted Nov 9, 2004·9 cites·20 claims
- 0651US8083892B2Apparatus for generating gas plasma, gas composition for generating plasma and method for manufacturing semiconductor device using the sameMIN YOUNG-MIN·Filed 2009·Granted Dec 27, 2011·0 cites·13 claims
- 0746US6202590B1Plasma apparatus for fabricating semiconductor devicesSAMSUNG ELECTRONICS CO LTD·Filed 1999·Granted Mar 20, 2001·16 cites·20 claims
- 0846US2008194113A1Methods and apparatus for semiconductor etching including an electro static chuckSAMSUNG ELECTRONICS CO LTD·Filed 2008·Application pending·0 cites
- 0936US6824617B2Input/output valve switching apparatus of semiconductor manufacturing systemSAMSUNG ELECTRONICS CO LTD·Filed 2002·Granted Nov 30, 2004·0 cites·17 claims
Join the waitlist — get patent alerts
Get an alert when Young-Min Min files or is granted a new patent.
We store only your email — no account needed. See our privacy policy.
Identity basis: PatentsView inventor disambiguation (2025Q4-odp release). How scoring works →