Inventor · disambiguated record
Kenneth Smyth
Also filed as: SMYTH KENNETH · SMYTH KENNETH D
4 granted patents·589 citations·filing 1996–2005
83Inventor score
Files withAPPLIED MATERIALS INC4
Top patents by PatentIndex Score
4 records- 0198US6083344AMulti-zone RF inductively coupled source configurationAPPLIED MATERIALS INC·Filed 1997·Granted Jul 4, 2000·346 cites·18 claims
- 0292US5643364APlasma chamber with fixed RF matchingAPPLIED MATERIALS INC·Filed 1996·Granted Jul 1, 1997·167 cites·17 claims
- 0388US6254738B1Use of variable impedance having rotating core to control coil sputter distributionAPPLIED MATERIALS INC·Filed 1998·Granted Jul 3, 2001·61 cites·72 claims
- 0487US7780814B2Wafer pre-clean reactor cable termination for selective suppression/reflection of source and bias frequency cross productsAPPLIED MATERIALS INC·Filed 2005·Granted Aug 24, 2010·15 cites·11 claims
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