Inventor · disambiguated record
Kevin Mukai
Also filed as: MUKAI KEVIN · MUKAI KEVIN M · MUKAI KEVIN MIKIO
6 granted patents·3 pending applications·22 citations·filing 2001–2014
77Inventor score
Top patents by PatentIndex Score
9 records- 0158US6514882B2Aggregate dielectric layer to reduce nitride consumptionAPPLIED MATERIALS INC·Filed 2001·Granted Feb 4, 2003·7 cites·15 claims
- 0257US10096728B2Firing metal for solar cellsSUNPOWER CORP·Filed 2014·Granted Oct 9, 2018·0 cites·18 claims
- 0357US7638161B2Method and apparatus for controlling dopant concentration during BPSG film deposition to reduce nitride consumptionAPPLIED MATERIALS INC·Filed 2001·Granted Dec 29, 2009·7 cites·3 claims
- 0455US7431967B2Limited thermal budget formation of PMD layersAPPLIED MATERIALS INC·Filed 2004·Granted Oct 7, 2008·3 cites·28 claims
- 0555US6511924B2Method of forming a silicon oxide layer on a substrateAPPLIED MATERIALS INC·Filed 2001·Granted Jan 28, 2003·5 cites·20 claims
- 0640US2009191711A1Hardmask open process with enhanced cd space shrink and reductionRUI YING·Filed 2008·Application pending·0 cites
- 0738US7205205B2Ramp temperature techniques for improved mean wafer before cleanAPPLIED MATERIALS INC·Filed 2003·Granted Apr 17, 2007·0 cites·29 claims
- 0836US2005136684A1Gap-fill techniquesAPPLIED MATERIALS INC·Filed 2003·Application pending·0 cites
- 0932US2003111438A1Process operation supplementation with oxygenFiled 2001·Application pending·0 cites
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