Inventor · disambiguated record

Shigeru Daigo

Also filed as: DAIGO Shigeru

2 granted patents·0 citations·filing 2018–2020

21Inventor score

Technology areasH10P

Files withSUMCO CORP2

Top patents by PatentIndex Score

2 records

0135US11728193B2Wafer manufacturing systemSUMCO CORP·Filed 2020·Granted Aug 15, 2023·0 cites·20 claims
0232US11626331B2Method of evaluating silicon wafer manufacturing process and method of manufacturing silicon waferSUMCO CORP·Filed 2018·Granted Apr 11, 2023·0 cites·8 claims

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