Inventor · disambiguated record
Pavan Kumar Perali
Also filed as: Perali Pavan Kumar
4 granted patents·1 pending application·1 citations·filing 2017–2023
55Inventor score
Top patents by PatentIndex Score
5 records- 0162US10304177B2Systems and methods of using z-layer context in logic and hot spot inspection for sensitivity improvement and nuisance suppressionKLA TENCOR CORP·Filed 2017·Granted May 28, 2019·1 cites·18 claims
- 0249US2024112326A1Inspection of adaptive patterned workpieces with dynamic design and deep learning-based renderingKLA CORP·Filed 2023·Application pending·0 cites
- 0347US11087449B2Deep learning networks for nuisance filteringKLA CORP·Filed 2019·Granted Aug 10, 2021·0 cites·27 claims
- 0444US11195268B2Target selection improvements for better design alignmentKLA TENCOR CORP·Filed 2018·Granted Dec 7, 2021·0 cites·18 claims
- 0532US11295432B2Broad band plasma inspection based on a nuisance mapKLA TENCOR CORP·Filed 2018·Granted Apr 5, 2022·0 cites·19 claims
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