Inventor · disambiguated record
Aravind Kamath
Also filed as: KAMATH ARAVIND · KAMATH ARAVIND MIYAR
10 granted patents·4 pending applications·153 citations·filing 2014–2024
88Inventor score
Files withAPPLIED MATERIALS INC14
Top patents by PatentIndex Score
14 records- 0194USD933725SDeposition ring for a substrate processing chamberAPPLIED MATERIALS INC·Filed 2019·Granted Oct 19, 2021·52 cites·1 claims
- 0294USD891382SProcess shield for a substrate processing chamberAPPLIED MATERIALS INC·Filed 2019·Granted Jul 28, 2020·55 cites·1 claims
- 0392US9888528B2Substrate support with multiple heating zonesAPPLIED MATERIALS INC·Filed 2015·Granted Feb 6, 2018·11 cites·16 claims
- 0491US10892180B2Lift pin assemblyAPPLIED MATERIALS INC·Filed 2014·Granted Jan 12, 2021·16 cites·15 claims
- 0579USD942516SProcess shield for a substrate processing chamberAPPLIED MATERIALS INC·Filed 2019·Granted Feb 1, 2022·17 cites·1 claims
- 0676US11201078B2Substrate position calibration for substrate supports in substrate processing systemsAPPLIED MATERIALS INC·Filed 2017·Granted Dec 14, 2021·2 cites·18 claims
- 0772US2024183028A1Methods and apparatus for precleaning and treating wafer surfacesAPPLIED MATERIALS INC·Filed 2024·Application pending·0 cites
- 0860US2025299926A1Biasable gas distribution plateAPPLIED MATERIALS INC·Filed 2024·Application pending·0 cites
- 0959US12112890B2Top magnets for decreased non-uniformity in PVDAPPLIED MATERIALS INC·Filed 2021·Granted Oct 8, 2024·0 cites·19 claims
- 1059US11939666B2Methods and apparatus for precleaning and treating wafer surfacesAPPLIED MATERIALS INC·Filed 2020·Granted Mar 26, 2024·0 cites·15 claims
- 1154US12228395B2Substrate position calibration for substrate supports in substrate processing systemsAPPLIED MATERIALS INC·Filed 2021·Granted Feb 18, 2025·0 cites·20 claims
- 1254US2023307211A1Process Chamber And Process Kits For Advanced PackagingAPPLIED MATERIALS INC·Filed 2022·Application pending·0 cites
- 1344US2016002778A1Substrate support with more uniform edge purgeAPPLIED MATERIALS INC·Filed 2014·Application pending·0 cites
- 1443US10134615B2Substrate support with improved RF returnAPPLIED MATERIALS INC·Filed 2016·Granted Nov 20, 2018·0 cites·18 claims
Identity basis: PatentsView inventor disambiguation (2025Q4-odp release). How scoring works →