Inventor · disambiguated record
Christian Hettich
Also filed as: HETTICH CHRISTIAN
3 granted patents·2 citations·filing 2009–2013
52Inventor score
Technology areasG03F
Top patents by PatentIndex Score
3 records- 0172US8786849B2Method for measuring an optical systemZEISS CARL SMT GMBH·Filed 2013·Granted Jul 22, 2014·2 cites·31 claims
- 0252US8169594B2Illumination system of a microlithographic projection exposure apparatusDIECKMANN NILS·Filed 2009·Granted May 1, 2012·0 cites·29 claims
- 0350US9116441B2Illumination system of a microlithographic projection exposure apparatusDIECKMANN NILS·Filed 2012·Granted Aug 25, 2015·0 cites·20 claims
Join the waitlist — get patent alerts
Get an alert when Christian Hettich files or is granted a new patent.
We store only your email — no account needed. See our privacy policy.
Identity basis: PatentsView inventor disambiguation (2025Q4-odp release). How scoring works →