Inventor · disambiguated record
Heinz Steinhardt
Also filed as: STEINHARDT HEINZ
3 granted patents·48 citations·filing 1992–2006
68Inventor score
Files withR3T GMBH RAPID REACTIVE RADICA1R3T RAPID REACTIVE RADICALS TE1SECON HALBLEITERPRODUKTIONSGER1
Top patents by PatentIndex Score
3 records- 0173US6706141B1Device to generate excited/ionized particles in a plasmaR3T RAPID REACTIVE RADICALS TE·Filed 2000·Granted Mar 16, 2004·15 cites·16 claims
- 0265US5489362AMethod for generating excited neutral particles for etching and deposition processes in semiconductor technology with a plasma discharge fed by microwave energySECON HALBLEITERPRODUKTIONSGER·Filed 1992·Granted Feb 6, 1996·33 cites·10 claims
- 0341US7665416B2Apparatus for generating excited and/or ionized particles in a plasma and a method for generating ionized particlesR3T GMBH RAPID REACTIVE RADICA·Filed 2006·Granted Feb 23, 2010·0 cites·28 claims
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Identity basis: PatentsView inventor disambiguation (2025Q4-odp release). How scoring works →