Inventor · disambiguated record

Chenhui Yu

Also filed as: YU CHENHUI

1 granted patent·0 citations·filing 2015–2015

6Inventor score

Technology areasG01B

Files withSHANGHAI MICRO ELECTRONICS EQUIPMENT GROUP CO LTD1

Top patents by PatentIndex Score

1 record

0133US10197390B2Pre-alignment measurement device and methodSHANGHAI MICRO ELECTRONICS EQUIPMENT GROUP CO LTD·Filed 2015·Granted Feb 5, 2019·0 cites·9 claims

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Identity basis: PatentsView inventor disambiguation (2025Q4-odp release). How scoring works →