Inventor · disambiguated record
Yohsuke Shibuya
Also filed as: SHIBUYA YOHSUKE
4 granted patents·3 pending applications·7 citations·filing 2009–2016
63Inventor score
Top patents by PatentIndex Score
7 records- 0163US8835296B2Electronic component manufacturing method including step of embedding metal filmWAKAYANAGI SHUNICHI·Filed 2011·Granted Sep 16, 2014·3 cites·13 claims
- 0262US8252118B2Substrate support device and plasma processing apparatusSHIBUYA YOHSUKE·Filed 2009·Granted Aug 28, 2012·4 cites·9 claims
- 0348US2013277213A1Sputtering apparatusCANON ANELVA CORP·Filed 2013·Application pending·0 cites
- 0446US9928998B2Sputtering apparatusCANON ANELVA CORP·Filed 2016·Granted Mar 27, 2018·0 cites·10 claims
- 0542US9437702B2Electronic component manufacturing method and electrode structureCANON ANELVA CORP·Filed 2014·Granted Sep 6, 2016·0 cites·16 claims
- 0642US2009283976A1Substrate holding apparatusCANON ANELVA CORP·Filed 2009·Application pending·0 cites
- 0731US2012073960A1Magnetron sputtering apparatus and electronic component manufacturing methodSHIBUYA YOHSUKE·Filed 2011·Application pending·0 cites
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Identity basis: PatentsView inventor disambiguation (2025Q4-odp release). How scoring works →