Inventor · disambiguated record

Mamoun El Ouasdad

Also filed as: OUASDAD MAMOUN EL

1 granted patent·2 citations·filing 2010–2010

20Inventor score

Technology areasG03B

Files withVAN DE KERKHOF MARCUS ADRIANUS1

Top patents by PatentIndex Score

1 record

0166US8068212B2Lithographic apparatus configured to compensate for variations in a critical dimension of projected features due to heating of optical elementsVAN DE KERKHOF MARCUS ADRIANUS·Filed 2010·Granted Nov 29, 2011·2 cites·15 claims

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