Inventor · disambiguated record

Sharon M. Szelag

Also filed as: SZELAG SHARON M

1 granted patent·37 citations·filing 2001–2001

48Inventor score

Technology areasH01J

Files withFEI CO1

Top patents by PatentIndex Score

1 record

0185US6709554B2Method and apparatus for repairing lithography masks using a charged particle beam systemFEI CO·Filed 2001·Granted Mar 23, 2004·37 cites·17 claims

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