Inventor · disambiguated record
Richika Kato
Also filed as: KATO RICHIKA
2 granted patents·1 pending application·926 citations·filing 2015–2016
76Inventor score
Technology areasH10P
Files withASM IP HOLDING BV3
Top patents by PatentIndex Score
3 records- 0196US10043661B2Method for protecting layer by forming hydrocarbon-based extremely thin filmASM IP HOLDING BV·Filed 2016·Granted Aug 7, 2018·463 cites·13 claims
- 0295US9899291B2Method for protecting layer by forming hydrocarbon-based extremely thin filmASM IP HOLDING BV·Filed 2015·Granted Feb 20, 2018·463 cites·16 claims
- 0333US2018102247A1Substrate processing apparatus and method of manufacturing semiconductor deviceASM IP HOLDING BV·Filed 2016·Application pending·0 cites
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Identity basis: PatentsView inventor disambiguation (2025Q4-odp release). How scoring works →