Inventor · disambiguated record
Seiji Wake
Also filed as: WAKE SEIJI
7 granted patents·51 citations·filing 2007–2018
83Inventor score
Top patents by PatentIndex Score
7 records- 0192US8178856B2Charged particle beam writing apparatus and method thereofNAKAYAMADA NORIAKI·Filed 2010·Granted May 15, 2012·22 cites·10 claims
- 0285US8129698B2Charged-particle beam writing method and charged-particle beam writing apparatusNAKAYAMADA NORIAKI·Filed 2009·Granted Mar 6, 2012·9 cites·20 claims
- 0383US7652271B2Charged-particle beam lithography with grid matching for correction of beam shot position deviationNUFLARE TECHNOLOGY INC·Filed 2007·Granted Jan 26, 2010·9 cites·10 claims
- 0481US8502175B2Charged particle beam pattern forming apparatus and charged particle beam pattern forming methodNAKAYAMADA NORIAKI·Filed 2011·Granted Aug 6, 2013·5 cites·10 claims
- 0569US7598504B2Writing error diagnosis method for charged particle beam photolithography apparatus and charged particle beam photolithography apparatusNUFLARE TECHNOLOGY INC·Filed 2007·Granted Oct 6, 2009·4 cites·20 claims
- 0668US10325755B2Charged particle beam lithography apparatus and charged particle beam lithography methodNUFLARE TECHNOLOGY INC·Filed 2018·Granted Jun 18, 2019·1 cites·5 claims
- 0761US7900185B2Pattern writing circuit self-diagnosis method for charged beam photolithography apparatus and charged beam photolithography apparatusNUFLARE TECHNOLOGY INC·Filed 2007·Granted Mar 1, 2011·1 cites·20 claims
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Identity basis: PatentsView inventor disambiguation (2025Q4-odp release). How scoring works →