Inventor · disambiguated record
Wayne J. Dunstan
Also filed as: DUNSTAN WAYNE · DUNSTAN WAYNE J
10 granted patents·73 citations·filing 2004–2016
88Inventor score
Top patents by PatentIndex Score
10 records- 0191US8598552B1System and method to optimize extreme ultraviolet light generationFRIHAUF PAUL·Filed 2012·Granted Dec 3, 2013·25 cites·20 claims
- 0287US7835414B2Laser gas injection systemCYMER INC·Filed 2007·Granted Nov 16, 2010·13 cites·10 claims
- 0383US9755396B1EUV LPP source with improved dose control by combining pulse modulation and pulse control modeASML NETHERLANDS BV·Filed 2016·Granted Sep 5, 2017·4 cites·19 claims
- 0481US8872122B2Method of timing laser beam pulses to regulate extreme ultraviolet light dosingCYMER INC·Filed 2013·Granted Oct 28, 2014·6 cites·20 claims
- 0578US8098698B2Active spectral control of DUV laser light sourceDUNSTAN WAYNE J·Filed 2010·Granted Jan 17, 2012·5 cites·15 claims
- 0674US7741639B2Multi-chambered excimer or molecular fluorine gas discharge laser fluorine injection controlCYMER INC·Filed 2004·Granted Jun 22, 2010·12 cites·288 claims
- 0771US7852889B2Active spectral control of DUV light sourceCYMER INC·Filed 2006·Granted Dec 14, 2010·3 cites·21 claims
- 0870US7830942B2Ultraviolet laser light source pulse energy control systemCYMER INC·Filed 2007·Granted Nov 9, 2010·3 cites·20 claims
- 0969US9588430B2System and method to adaptively pre-compensate for target material push-out to optimize extreme ultraviolet light productionASML NETHERLANDS BV·Filed 2016·Granted Mar 7, 2017·1 cites·16 claims
- 1052US9238243B2System and method to adaptively pre-compensate for target material push-out to optimize extreme ultraviolet light productionVAN DER BURGT JEROEN·Filed 2012·Granted Jan 19, 2016·1 cites·18 claims
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Identity basis: PatentsView inventor disambiguation (2025Q4-odp release). How scoring works →