Inventor · disambiguated record
Michael P. Kanouff
Also filed as: KANOUFF MICHAEL · KANOUFF MICHAEL P
6 granted patents·3 pending applications·179 citations·filing 1998–2015
85Inventor score
Top patents by PatentIndex Score
9 records- 0195US10034362B2Plasma-based light sourceKLA TENCOR CORP·Filed 2015·Granted Jul 24, 2018·11 cites·45 claims
- 0295US8563325B1Coaxial microreactor for particle synthesisBARTSCH MICHAEL·Filed 2010·Granted Oct 22, 2013·88 cites·21 claims
- 0380US6714624B2Discharge source with gas curtain for protecting optics from particlesEUV LLC·Filed 2001·Granted Mar 30, 2004·32 cites·24 claims
- 0478US10101664B2Apparatus and methods for optics protection from debris in plasma-based light sourceKLA TENCOR CORP·Filed 2015·Granted Oct 16, 2018·2 cites·20 claims
- 0572US6198792B1Wafer chamber having a gas curtain for extreme-UV lithographyEUV LLC·Filed 1998·Granted Mar 6, 2001·34 cites·25 claims
- 0651US2010061926A1Heating systems for hydrogen storage materialsGM GLOBAL TECH OPERATIONS INC·Filed 2009·Application pending·0 cites
- 0749US6206528B1Surface figure control for coated opticsEUV LLC·Filed 1998·Granted Mar 27, 2001·12 cites·15 claims
- 0838US2014166051A1Apparatus, system, and method for separating gases and mitigating debris in a controlled pressure environmentKLA TENCOR CORP·Filed 2013·Application pending·0 cites
- 0931US2007080062A1Coated metal structures and methods of making and using thereofHARNETT CINDY K·Filed 2005·Application pending·0 cites
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