Inventor · disambiguated record
Farro Kaveh
Also filed as: KAVEH FARRO · KAVEH FARRO F · KAVEH FARRO FRANK
8 granted patents·241 citations·filing 1996–2006
89Inventor score
Top patents by PatentIndex Score
8 records- 0191US6142163AMethod and apparatus for pressure control in vacuum processorsLAM RES CORP·Filed 1998·Granted Nov 7, 2000·76 cites·39 claims
- 0284US6526355B1Integrated full wavelength spectrometer for wafer processingLAM RES CORP·Filed 2000·Granted Feb 25, 2003·23 cites·6 claims
- 0384US5758680AMethod and apparatus for pressure control in vacuum processorsLAM RES CORP·Filed 1996·Granted Jun 2, 1998·52 cites·21 claims
- 0474US6622286B1Integrated electronic hardware for wafer processing control and diagnosticLAM RES CORP·Filed 2000·Granted Sep 16, 2003·20 cites·10 claims
- 0573US8744624B1Substrate alignment systemKAVEH FARRO·Filed 2006·Granted Jun 3, 2014·6 cites·20 claims
- 0672US6364762B1Wafer atmospheric transport module having a controlled mini-environmentLAM RES CORP·Filed 1999·Granted Apr 2, 2002·43 cites·32 claims
- 0760US5803107AMethod and apparatus for pressure control in vacuum processorsLAM RES CORP·Filed 1996·Granted Sep 8, 1998·20 cites·9 claims
- 0830US5961724ATechniques for reducing particulate contamination on a substrate during processingLAM RES CORP·Filed 1998·Granted Oct 5, 1999·1 cites·21 claims
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Identity basis: PatentsView inventor disambiguation (2025Q4-odp release). How scoring works →