Inventor · disambiguated record
Gregory Bartlett
Also filed as: BARTLETT GREGORY · BARTLETT GREGORY M · BARTLETT GREGORY MICHAEL
9 granted patents·1 pending application·1,483 citations·filing 2005–2024
92Inventor score
Top patents by PatentIndex Score
10 records- 0196US10262859B2Process for forming a film on a substrate using multi-port injection assembliesASM IP HOLDING BV·Filed 2018·Granted Apr 16, 2019·413 cites·14 claims
- 0296US9892913B2Radial and thickness control via biased multi-port injection settingsASM IP HOLDING BV·Filed 2017·Granted Feb 13, 2018·464 cites·17 claims
- 0395US7648579B2Substrate support system for reduced autodoping and backside depositionASM INC·Filed 2005·Granted Jan 19, 2010·42 cites·30 claims
- 0492US9169975B2Systems and methods for mass flow controller verificationSARIN MICHAEL CHRISTOPHER·Filed 2012·Granted Oct 27, 2015·506 cites·34 claims
- 0592US8728239B2Methods and apparatus for a gas panel with constant gas flowBAUER MATTHIAS·Filed 2011·Granted May 20, 2014·16 cites·13 claims
- 0689US11053591B2Multi-port gas injection system and reactor system including sameASM IP HOLDING BV·Filed 2018·Granted Jul 6, 2021·4 cites·22 claims
- 0786US8088225B2Substrate support system for reduced autodoping and backside depositionGOODMAN MATT G·Filed 2009·Granted Jan 3, 2012·17 cites·13 claims
- 0886US8047706B2Calibration of temperature control system for semiconductor processing chamberASM INC·Filed 2008·Granted Nov 1, 2011·18 cites·28 claims
- 0977US8834955B2Methods and apparatus for a gas panel with constant gas flowASM INC·Filed 2014·Granted Sep 16, 2014·3 cites·10 claims
- 1058US2025207257A1Chamber arrangements including backpressure controllers, semiconductor processing systems including chamber arrangements, and methods of forming semiconductor structures using chamber arrangements having backpressure controllersASM IP HOLDING BV·Filed 2024·Application pending·0 cites
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Identity basis: PatentsView inventor disambiguation (2025Q4-odp release). How scoring works →