Inventor · disambiguated record
Julian G. Blake
Also filed as: BLAKE JULIAN · BLAKE JULIAN G
59 granted patents·15 pending applications·888 citations·filing 1989–2022
98Inventor score
Files withEATON CORP13VARIAN SEMICONDUCTOR EQUIPMENT11APPLIED MATERIALS INC10VARIAN SEMICONDUCTOR EQUIPMENT ASS INC9IBIS TECHNOLOGY CORP5
Top patents by PatentIndex Score
74 records- 0195US5554854AIn situ removal of contaminants from the interior surfaces of an ion beam implanterEATON CORP·Filed 1995·Granted Sep 10, 1996·101 cites·36 claims
- 0293US9437397B2Textured silicon liners in substrate processing systemsVARIAN SEMICONDUCTOR EQUIPMENT ASS INC·Filed 2013·Granted Sep 6, 2016·5 cites·17 claims
- 0391US7935942B2Technique for low-temperature ion implantationVARIAN SEMICONDUCTOR EQUIPMENT·Filed 2006·Granted May 3, 2011·16 cites·19 claims
- 0491US7816239B2Technique for manufacturing a solar cellVARIAN SEMICONDUCTOR EQUIPMENT·Filed 2009·Granted Oct 19, 2010·16 cites·15 claims
- 0591US5633506AMethod and apparatus for in situ removal of contaminants from ion beam neutralization and implantation apparatusesEATON CORP·Filed 1995·Granted May 27, 1997·70 cites·27 claims
- 0688US5019233ASputtering systemEATON CORP·Filed 1989·Granted May 28, 1991·103 cites·12 claims
- 0786US9692325B2High conductivity electrostatic chuckSUURONEN DAVID·Filed 2011·Granted Jun 27, 2017·10 cites·25 claims
- 0886US5825038ALarge area uniform ion beam formationEATON CORP·Filed 1996·Granted Oct 20, 1998·49 cites·55 claims
- 0984US5436790AWafer sensing and clamping monitorEATON CORP·Filed 1993·Granted Jul 25, 1995·99 cites·9 claims
- 1083US9799492B2Textured silicon liners in substrate processing systemsVARIAN SEMICONDUCTOR EQUIPMENT ASS INC·Filed 2016·Granted Oct 24, 2017·3 cites·20 claims
- 1183US8814239B2Techniques for handling media arraysFORDERHASE PAUL·Filed 2012·Granted Aug 26, 2014·8 cites·20 claims
- 1283US8319196B2Technique for low-temperature ion implantationENGLAND JONATHAN G·Filed 2011·Granted Nov 27, 2012·7 cites·20 claims
- 1381US5760405APlasma chamber for controlling ion dosage in ion implantationEATON CORP·Filed 1996·Granted Jun 2, 1998·66 cites·10 claims
- 1480US11315819B2System apparatus and method for enhancing electrical clamping of substrates using photo-illuminationAPPLIED MATERIALS INC·Filed 2020·Granted Apr 26, 2022·1 cites·13 claims
- 1580US9025305B2High surface resistivity electrostatic chuckCOOKE RICHARD A·Filed 2011·Granted May 5, 2015·5 cites·14 claims
- 1679US10825645B2System and method for reduced workpiece adhesion due to electrostatic charge during removal from a processing stationVARIAN SEMICONDUCTOR EQUIPMENT ASS INC·Filed 2018·Granted Nov 3, 2020·2 cites·11 claims
- 1779US8153466B2Mask applied to a workpieceLOW RUSSELL J·Filed 2010·Granted Apr 10, 2012·2 cites·18 claims
- 1878US9644269B2Diffusion resistant electrostatic clampVARIAN SEMICONDUCTOR EQUIPMENT ASS INC·Filed 2014·Granted May 9, 2017·3 cites·14 claims
- 1978US7993698B2Techniques for temperature controlled ion implantationVARIAN SEMICONDUCTOR EQUIPMENT·Filed 2006·Granted Aug 9, 2011·5 cites·8 claims
- 2077US5811823AControl mechanisms for dosimetry control in ion implantation systemsEATON CORP·Filed 1996·Granted Sep 22, 1998·50 cites·37 claims
- 2176US8592786B2Platen clamping surface monitoringVARIAN SEMICONDUCTOR EQUIPMENT·Filed 2013·Granted Nov 26, 2013·3 cites·17 claims
- 2275US10866503B1Low emission implantation mask and substrate assemblyAPPLIED MATERIALS INC·Filed 2019·Granted Dec 15, 2020·1 cites·20 claims
- 2375US8531814B2Removal of charge between a substrate and an electrostatic clampSTONE DALE K·Filed 2010·Granted Sep 10, 2013·4 cites·8 claims
- 2475US5656092AApparatus for capturing and removing contaminant particles from an interior region of an ion implanterEATON CORP·Filed 1995·Granted Aug 12, 1997·27 cites·12 claims
- 2575US5444597AWafer release method and apparatusFiled 1993·Granted Aug 22, 1995·69 cites·17 claims
- 2673US5670217AMethod for capturing and removing contaminant particles from an interior region of an ion implanterEATON CORP·Filed 1996·Granted Sep 23, 1997·24 cites·10 claims
- 2772US9613839B2Control of workpiece temperature via backside gas flowVARIAN SEMICONDUCTOR EQUIPMENT ASS INC·Filed 2014·Granted Apr 4, 2017·2 cites·15 claims
- 2871US9567691B2Melt purification and delivery systemKELLERMAN PETER L·Filed 2009·Granted Feb 14, 2017·1 cites·13 claims
- 2970US8746666B2Media carrierHERTEL RICHARD·Filed 2011·Granted Jun 10, 2014·4 cites·9 claims
- 3070US8709533B2Technique for manufacturing bit patterned mediaSINCLAIR FRANK·Filed 2011·Granted Apr 29, 2014·2 cites·19 claims
- 3169US8148237B2Pressurized treatment of substrates to enhance cleaving processRAMAPPA DEEPAK·Filed 2010·Granted Apr 3, 2012·2 cites·17 claims
- 3267US9728430B2Electrostatic chuck with LED heatingVARIAN SEMICONDUCTOR EQUIPMENT ASS INC·Filed 2015·Granted Aug 8, 2017·1 cites·20 claims
- 3367US6794662B1Thermosetting resin wafer-holding pinIBIS TECHNOLOGY CORP·Filed 2003·Granted Sep 21, 2004·12 cites·26 claims
- 3466US8598021B2Method for junction avoidance on edge of workpiecesBLAKE JULIAN·Filed 2011·Granted Dec 3, 2013·2 cites·5 claims
- 3565US7067829B2Power sag detection and control in ion implanting systemIBIS TECHNOLOGY COPORATION·Filed 2004·Granted Jun 27, 2006·8 cites·25 claims
- 3665US6998353B2Active wafer cooling during damage engineering implant to enhance buried oxide formation in SIMOX wafersIBIS TECHNOLOGY CORP·Filed 2001·Granted Feb 14, 2006·13 cites·17 claims
- 3765US6025602AIon implantation system for implanting workpiecesEATON CORP·Filed 1998·Granted Feb 15, 2000·26 cites·30 claims
- 3860US8329260B2Cooled cleaving implantBLAKE JULIAN G·Filed 2008·Granted Dec 11, 2012·3 cites·17 claims
- 3959US12464605B2Active cooling of quartz enveloped heaters in vacuumAPPLIED MATERIALS INC·Filed 2022·Granted Nov 4, 2025·0 cites·10 claims
- 4056US10385454B2Diffusion resistant electrostatic clampVARIAN SEMICONDUCTOR EQUIPMENT ASS INC·Filed 2017·Granted Aug 20, 2019·0 cites·17 claims
- 4155US2019252230A1Plasma resistant electrostatic clampVARIAN SEMICONDUCTOR EQUIPMENT ASS INC·Filed 2019·Application pending·0 cites
- 4254US11875967B2System apparatus and method for enhancing electrical clamping of substrates using photo-illuminationAPPLIED MATERIALS INC·Filed 2020·Granted Jan 16, 2024·0 cites·20 claims
- 4354US10811214B2Low emission cladding and ion implanterAPPLIED MATERIALS INC·Filed 2019·Granted Oct 20, 2020·0 cites·18 claims
- 4454US5895923AIon beam shield for implantation systemsEATON CORP·Filed 1996·Granted Apr 20, 1999·19 cites·24 claims
- 4554US5793050AIon implantation system for implanting workpiecesEATON CORP·Filed 1996·Granted Aug 11, 1998·16 cites·34 claims
- 4652US6433342B1Coated wafer holding pinIBIS TECHNOLOGY CORP·Filed 1999·Granted Aug 13, 2002·16 cites·16 claims
- 4752US2015228524A1Plasma resistant electrostatic clampVARIAN SEMICONDUCTOR EQUIPMENT·Filed 2014·Application pending·0 cites
- 4851US11069554B1Carbon nanotube electrostatic chuckAPPLIED MATERIALS INC·Filed 2020·Granted Jul 20, 2021·0 cites·10 claims
- 4951US8466039B2Pressurized treatment of substrates to enhance cleaving processRAMAPPA DEEPAK A·Filed 2012·Granted Jun 18, 2013·0 cites·7 claims
- 5051US6774376B2Wafer holding pinIBIS TECHNOLOGY CORP·Filed 2002·Granted Aug 10, 2004·3 cites·29 claims
Showing the top 50 of 74 patent records by PatentIndex Score.
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