Inventor · disambiguated record
Jung-Mo Sung
Also filed as: SUNG JUNG-MO
6 granted patents·1 pending application·8 citations·filing 2018–2021
73Inventor score
Technology areasH10P
Files withSAMSUNG ELECTRONICS CO LTD7
Top patents by PatentIndex Score
7 records- 0186US10790122B2Plasma processing apparatus and method of manufacturing semiconductor device using the sameSAMSUNG ELECTRONICS CO LTD·Filed 2018·Granted Sep 29, 2020·4 cites·20 claims
- 0285US10964578B2Apparatus for manufacturing semiconductor device and manufacturing method of semiconductor deviceSAMSUNG ELECTRONICS CO LTD·Filed 2019·Granted Mar 30, 2021·4 cites·20 claims
- 0364US11521866B2Plasma processing method, plasma processing apparatus and method of manufacturing semiconductor device using the apparatusSAMSUNG ELECTRONICS CO LTD·Filed 2021·Granted Dec 6, 2022·0 cites·20 claims
- 0463US11437264B2Apparatus for manufacturing semiconductor device and manufacturing method of semiconductor deviceSAMSUNG ELECTRONICS CO LTD·Filed 2021·Granted Sep 6, 2022·0 cites·10 claims
- 0562US11437222B2Plasma processing apparatus and method of manufacturing semiconductor device using the sameSAMSUNG ELECTRONICS CO LTD·Filed 2020·Granted Sep 6, 2022·0 cites·20 claims
- 0657US11037806B2Plasma processing method, plasma processing apparatus and method of manufacturing semiconductor device using the apparatusSAMSUNG ELECTRONICS CO LTD·Filed 2019·Granted Jun 15, 2021·0 cites·20 claims
- 0740US2019148119A1Plasma processing apparatusSAMSUNG ELECTRONICS CO LTD·Filed 2018·Application pending·0 cites
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Identity basis: PatentsView inventor disambiguation (2025Q4-odp release). How scoring works →