Inventor · disambiguated record
Max C. Glenn
Also filed as: GLENN MAX · GLENN MAX C
25 granted patents·8 pending applications·709 citations·filing 1985–2013
97Inventor score
Top patents by PatentIndex Score
33 records- 0198US5485753APiezoresistive silicon pressure sensor implementing long diaphragms with large aspect ratiosHONEYWELL INC·Filed 1993·Granted Jan 23, 1996·136 cites·15 claims
- 0297US4855544AMultiple level miniature electromechanical accelerometer switchHONEYWELL INC·Filed 1988·Granted Aug 8, 1989·102 cites·4 claims
- 0395US4891985AForce sensor with attached massHONEYWELL INC·Filed 1986·Granted Jan 9, 1990·88 cites·3 claims
- 0488US7074636B2Methods and apparatus for attaching getters to MEMS device housingsHONEYWELL INT INC·Filed 2005·Granted Jul 11, 2006·17 cites·24 claims
- 0587US5714690APiezoresistive silicon pressure sensor manufacture implementing long diaphragms with large aspect ratiosHONEYWELL INC·Filed 1996·Granted Feb 3, 1998·55 cites·11 claims
- 0687US4763098AFlip-chip pressure transducerHONEYWELL INC·Filed 1985·Granted Aug 9, 1988·58 cites·7 claims
- 0784US4665754APressure transducerHONEYWELL INC·Filed 1985·Granted May 19, 1987·48 cites·38 claims
- 0883US6978673B2Methods and systems for simultaneously fabricating multi-frequency MEMS devicesHONEYWELL INT INC·Filed 2003·Granted Dec 27, 2005·54 cites·32 claims
- 0979US6544655B1Methods for reducing the curvature in boron-doped silicon micromachined structuresHONEYWELL INT INC·Filed 2000·Granted Apr 8, 2003·17 cites·6 claims
- 1074US8011247B2Multistage proof-mass movement deceleration within MEMS structuresHONEYWELL INT INC·Filed 2008·Granted Sep 6, 2011·8 cites·20 claims
- 1171US6865944B2Methods and systems for decelerating proof mass movements within MEMS structuresHONEYWELL INT INC·Filed 2002·Granted Mar 15, 2005·25 cites·42 claims
- 1269US8614491B2Package interface plate for package isolation structuresGLENN MAX C·Filed 2010·Granted Dec 24, 2013·3 cites·14 claims
- 1369US6914323B2Methods and apparatus for attaching getters to MEMS device housingsHONEYWELL INT INC·Filed 2003·Granted Jul 5, 2005·14 cites·17 claims
- 1468US6041659AMethods and apparatus for sensing differential and gauge static pressure in a fluid flow lineHONEYWELL INC·Filed 1998·Granted Mar 28, 2000·30 cites·20 claims
- 1566US6782748B2High-G acceleration protection by cagingHONEYWELL INT INC·Filed 2002·Granted Aug 31, 2004·18 cites·21 claims
- 1662US7977786B2Saw debris reduction in MEMS devicesHONEYWELL INT INC·Filed 2008·Granted Jul 12, 2011·2 cites·16 claims
- 1761US6927098B2Methods and apparatus for attaching MEMS devices to housingHONEYWELL INT INC·Filed 2003·Granted Aug 9, 2005·10 cites·20 claims
- 1860US6987304B2Methods and apparatus for particle reduction in MEMS devicesHONEYWELL INT INC·Filed 2003·Granted Jan 17, 2006·10 cites·16 claims
- 1957US7297573B2Methods and apparatus for particle reduction in MEMS devicesHONEYWELL INT INC·Filed 2005·Granted Nov 20, 2007·2 cites·9 claims
- 2053US7314777B2Chip packaging systems and methodsHONEYWELL INT INC·Filed 2004·Granted Jan 1, 2008·3 cites·22 claims
- 2153US7037805B2Methods and apparatus for attaching a die to a substrateHONEYWELL INT INC·Filed 2004·Granted May 2, 2006·6 cites·61 claims
- 2252US2008063505A1Chip Packaging Systems and MethodsHONEYWELL INT INC·Filed 2007·Application pending·0 cites
- 2351US2014065770A1Package interface plate for package isolation structuresHONEYWELL INT INC·Filed 2013·Application pending·0 cites
- 2450US6969425B2Methods for reducing the curvature in boron-doped silicon micromachined structuresHONEYWELL INT INC·Filed 2003·Granted Nov 29, 2005·2 cites·30 claims
- 2549US2008271532A1Frequency shifting of rotational harmonics in mems devicesHONEYWELL INT INC·Filed 2008·Application pending·0 cites
- 2647US2006214247A1Getter deposition for vacuum packagingHONEYWELL INT INC·Filed 2006·Application pending·0 cites
- 2746US7800190B2Getter on die in an upper sense plate designed systemHONEYWELL INT INC·Filed 2008·Granted Sep 21, 2010·0 cites·13 claims
- 2846US6946200B2Methods for reducing the curvature in boron-doped silicon micromachined structuresHONEYWELL INT INC·Filed 2002·Granted Sep 20, 2005·1 cites·19 claims
- 2946US2010020517A1Mems bump pattern die alignment systems and methodsHONEYWELL INT INC·Filed 2008·Application pending·0 cites
- 3046US2007163346A1Frequency shifting of rotational harmonics in mems devicesHONEYWELL INT INC·Filed 2006·Application pending·0 cites
- 3143US9476712B2MEMS device mechanism enhancement for robust operation through severe shock and accelerationHONEYWELL INT INC·Filed 2013·Granted Oct 25, 2016·0 cites·17 claims
- 3238US2007056370A1Mems sensor packageHONEYWELL INT INC·Filed 2005·Application pending·0 cites
- 3335US2010139373A1Mems sensor packageHONEYWELL INTERNATIONA INC·Filed 2010·Application pending·0 cites
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