Inventor · disambiguated record
Gregory Bogush
Also filed as: BOGUSH GREGORY H
3 granted patents·1 pending application·52 citations·filing 2001–2002
70Inventor score
Files withCABOT MICROELECTRONICS CORP3
Top patents by PatentIndex Score
4 records- 0184US6726534B1Preequilibrium polishing method and systemCABOT MICROELECTRONICS CORP·Filed 2002·Granted Apr 27, 2004·39 cites·45 claims
- 0276US6612911B2Alkali metal-containing polishing system and methodCABOT MICROELECTRONICS CORP·Filed 2002·Granted Sep 2, 2003·11 cites·48 claims
- 0343US7677956B2Compositions and methods for dielectric CMPCABOT MICROELECTRONICS CORP·Filed 2002·Granted Mar 16, 2010·2 cites·22 claims
- 0432US2001037821A1Integrated chemical-mechanical polishingFiled 2001·Application pending·0 cites
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Identity basis: PatentsView inventor disambiguation (2025Q4-odp release). How scoring works →