Inventor · disambiguated record
German E. Rylov
Also filed as: RYLOV GERMAN · RYLOV GERMAN E
9 granted patents·2 pending applications·144 citations·filing 2002–2011
90Inventor score
Top patents by PatentIndex Score
11 records- 0193US8126027B2Line narrowing moduleALGOTS J MARTIN·Filed 2011·Granted Feb 28, 2012·21 cites·20 claims
- 0289US7088758B2Relax gas discharge laser lithography light sourceCYMER INC·Filed 2004·Granted Aug 8, 2006·33 cites·109 claims
- 0388US7653095B2Active bandwidth control for a laserCYMER INC·Filed 2005·Granted Jan 26, 2010·12 cites·28 claims
- 0488US7366219B2Line narrowing moduleCYMER INC·Filed 2004·Granted Apr 29, 2008·20 cites·112 claims
- 0586US6798812B2Two chamber F2 laser system with F2 pressure based line selectionCYMER INC·Filed 2002·Granted Sep 28, 2004·25 cites·64 claims
- 0685US6801560B2Line selected F2 two chamber laser systemCYMER INC·Filed 2002·Granted Oct 5, 2004·18 cites·77 claims
- 0780US7643528B2Immersion lithography laser light source with pulse stretcherCYMER INC·Filed 2007·Granted Jan 5, 2010·6 cites·11 claims
- 0863US7058107B2Line selected F2 two chamber laser systemCYMER INC·Filed 2004·Granted Jun 6, 2006·5 cites·77 claims
- 0960US7218661B2Line selected F2 two chamber laser systemCYMER INC·Filed 2004·Granted May 15, 2007·4 cites·77 claims
- 1057US2010097704A1Line narrowing moduleCYMER INC·Filed 2009·Application pending·0 cites
- 1151US2010074295A1Immersion lithography laser light source with pulse stretcherCYMER INC·Filed 2009·Application pending·0 cites
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