Inventor · disambiguated record
J. Martin Algots
Also filed as: ALGOTS J M · ALGOTS J MARTIN · HEMBERG OSCAR
9 granted patents·3 pending applications·366 citations·filing 2004–2012
91Inventor score
Top patents by PatentIndex Score
12 records- 0198US7405416B2Method and apparatus for EUV plasma source target deliveryCYMER INC·Filed 2005·Granted Jul 29, 2008·118 cites·10 claims
- 0298US7372056B2LPP EUV plasma source material target delivery systemCYMER INC·Filed 2005·Granted May 13, 2008·109 cites·21 claims
- 0393US8126027B2Line narrowing moduleALGOTS J MARTIN·Filed 2011·Granted Feb 28, 2012·21 cites·20 claims
- 0492US7122816B2Method and apparatus for EUV light source target material handlingCYMER INC·Filed 2005·Granted Oct 17, 2006·42 cites·25 claims
- 0591US7838854B2Method and apparatus for EUV plasma source target deliveryCYMER INC·Filed 2008·Granted Nov 23, 2010·25 cites·20 claims
- 0689US7589337B2LPP EUV plasma source material target delivery systemCYMER INC·Filed 2008·Granted Sep 15, 2009·23 cites·11 claims
- 0788US7366219B2Line narrowing moduleCYMER INC·Filed 2004·Granted Apr 29, 2008·20 cites·112 claims
- 0876US9279445B2Droplet generator steering systemBAUMGART PETER M·Filed 2011·Granted Mar 8, 2016·5 cites·18 claims
- 0973US8855166B26 KHz and above gas discharge laser systemUJAZDOWSKI RICHARD C·Filed 2012·Granted Oct 7, 2014·3 cites·19 claims
- 1057US2010097704A1Line narrowing moduleCYMER INC·Filed 2009·Application pending·0 cites
- 1146US2006222034A16 Khz and above gas discharge laser systemCYMER INC·Filed 2005·Application pending·0 cites
- 1243US2006114956A1High power high pulse repetition rate gas discharge laser system bandwidth managementSANDSTROM RICHARD L·Filed 2004·Application pending·0 cites
Identity basis: PatentsView inventor disambiguation (2025Q4-odp release). How scoring works →