Inventor · disambiguated record
Tony D. Flaim
Also filed as: FLAIM TONY · FLAIM TONY D
53 granted patents·7 pending applications·1,140 citations·filing 1986–2020
99Inventor score
Top patents by PatentIndex Score
60 records- 0194US5693691AThermosetting anti-reflective coatings compositionsBREWER SCIENCE INC·Filed 1995·Granted Dec 2, 1997·166 cites·22 claims
- 0293US5281690ABase-soluble polyimide release layers for use in microlithographic processingBREWER SCIENCE INC·Filed 1989·Granted Jan 25, 1994·62 cites·21 claims
- 0392US8092628B2Cyclic olefin compositions for temporary wafer bondingHONG WENBIN·Filed 2008·Granted Jan 10, 2012·17 cites·13 claims
- 0491US5935760AThermosetting polyester anti-reflective coatings for multilayer photoresist processesBREWER SCIENCE INC·Filed 1997·Granted Aug 10, 1999·84 cites·21 claims
- 0591US5234990APolymers with intrinsic light-absorbing properties for anti-reflective coating applications in deep ultraviolet microlithographyBREWER SCIENCE INC·Filed 1992·Granted Aug 10, 1993·61 cites·6 claims
- 0691US4732858AAdhesion promoting product and process for treating an integrated circuit substrateBREWER SCIENCE INC·Filed 1986·Granted Mar 22, 1988·67 cites·10 claims
- 0790US7803458B2Hybrid organic-inorganic polymer coatings with high refractive indicesBREWER SCIENCE INC·Filed 2005·Granted Sep 28, 2010·8 cites·18 claims
- 0890US5892096ANon-subliming mid-UV dyes and ultra-thin organic arcs having differential solubilityBREWER SCIENCE INC·Filed 1996·Granted Apr 6, 1999·36 cites·2 claims
- 0989US9111981B2Method for reversibly mounting a device wafer to a carrier substrateFLAIM TONY D·Filed 2009·Granted Aug 18, 2015·16 cites·31 claims
- 1089US4950583AAdhesion promoting product and process for treating an integrated circuit substrate therewithBREWER SCIENCE INC·Filed 1986·Granted Aug 21, 1990·54 cites·22 claims
- 1188US5688987ANon-subliming Mid-UV dyes and ultra-thin organic arcs having differential solubilityBREWER SCIENCE INC·Filed 1994·Granted Nov 18, 1997·26 cites·3 claims
- 1287US9827740B2Polyimides as laser release materials for 3-D IC applicationsBREWER SCIENCE INC·Filed 2015·Granted Nov 28, 2017·6 cites·15 claims
- 1386US9263314B2Multiple bonding layers for thin-wafer handlingPULIGADDA RAMA·Filed 2011·Granted Feb 16, 2016·8 cites·5 claims
- 1484US8415083B2On-track process for patterning hardmask by multiple dark field exposuresSUN SAM X·Filed 2011·Granted Apr 9, 2013·6 cites·11 claims
- 1584US6303270B1Highly plasma etch-resistant photoresist composition containing a photosensitive polymeric titania precursorUNIV MISSOURI·Filed 1999·Granted Oct 16, 2001·59 cites·48 claims
- 1684US5057399AMethod for making polyimide microlithographic compositions soluble in alkaline mediaFLAIM TONY·Filed 1989·Granted Oct 15, 1991·40 cites·16 claims
- 1782US5919598AMethod for making multilayer resist structures with thermosetting anti-reflective coatingsBREWER SCIENCE INC·Filed 1996·Granted Jul 6, 1999·62 cites·1 claims
- 1882US5336925APositive working polyamic acid/imide photoresist compositions and their use as dielectricsBREWER SCIENCE INC·Filed 1992·Granted Aug 9, 1994·76 cites·4 claims
- 1981US9099512B2Article including a device wafer reversibly mountable to a carrier substrateFLAIM TONY D·Filed 2010·Granted Aug 4, 2015·5 cites·28 claims
- 2081US8221571B2Cyclic olefin compositions for temporary wafer bondingHONG WENBIN·Filed 2010·Granted Jul 17, 2012·4 cites·11 claims
- 2180US8836082B2Reversal lithography approach by selective deposition of nanoparticlesLIN QIN·Filed 2011·Granted Sep 16, 2014·5 cites·21 claims
- 2279US7749603B2Two-layer transparent electrostatic charge dissipating coatingLUMIMOVE INC·Filed 2008·Granted Jul 6, 2010·7 cites·24 claims
- 2376US10103048B2Dual-layer bonding material process for temporary bonding of microelectronic substrates to carrier substratesBREWER SCIENCE INC·Filed 2014·Granted Oct 16, 2018·3 cites·24 claims
- 2475US7316844B2Spin-on protective coatings for wet-etch processing of microelectronic substratesBREWER SCIENCE INC·Filed 2004·Granted Jan 8, 2008·17 cites·16 claims
- 2575US6080530AThermosetting polyester anti-reflective coatings for multilayer photoresist processesBREWER SCIENCE INC·Filed 1999·Granted Jun 27, 2000·39 cites·2 claims
- 2673US8771927B2Acid-etch resistant, protective coatingsTANG TINGJI·Filed 2010·Granted Jul 8, 2014·4 cites·16 claims
- 2771US6670425B2Anti-reflective coating of polymer with epoxide rings reacted with light attenuating compound and unreacted epoxide ringsBREWER SCIENCE INC·Filed 2001·Granted Dec 30, 2003·9 cites·5 claims
- 2871US5362608AMicrolithographic substrate cleaning and compositions thereforBREWER SCIENCE INC·Filed 1992·Granted Nov 8, 1994·49 cites·8 claims
- 2970US9224631B2Multiple bonding layers for thin-wafer handlingBREWER SCIENCE INC·Filed 2014·Granted Dec 29, 2015·1 cites·12 claims
- 3070US8133659B2On-track process for patterning hardmask by multiple dark field exposuresSUN SAM X·Filed 2009·Granted Mar 13, 2012·3 cites·14 claims
- 3168US9127126B2Development of high-viscosity bonding layer through in-situ polymer chain extensionHONG WENBIN·Filed 2012·Granted Sep 8, 2015·2 cites·30 claims
- 3267US10304720B2Laser ablative dielectric materialBREWER SCIENCE INC·Filed 2017·Granted May 28, 2019·2 cites·18 claims
- 3366US8808969B2Method of making radiation-sensitive sol-gel materialsLIN QIN·Filed 2012·Granted Aug 19, 2014·1 cites·13 claims
- 3466US8771442B2Cyclic olefin compositions for temporary wafer bondingHONG WENBIN·Filed 2012·Granted Jul 8, 2014·1 cites·6 claims
- 3566US7758913B2Spin-on protective coatings for wet-etch processing of microelectronic substratesBREWER SCIENCE INC·Filed 2006·Granted Jul 20, 2010·2 cites·32 claims
- 3666US5578676AMethod for making polymers with intrinsic light-absorbing propertiesFiled 1993·Granted Nov 26, 1996·16 cites·12 claims
- 3764US6042990AThermosetting polyester anti-reflective coatings for multilayer photoresist processesBREWER SCIENCE INC·Filed 1999·Granted Mar 28, 2000·24 cites·3 claims
- 3862US8202442B2Spin-on protective coatings for wet-etch processing of microelectronic substratesLI CHENGHONG·Filed 2007·Granted Jun 19, 2012·2 cites·8 claims
- 3961US7709178B2Alkaline-resistant negative photoresist for silicon wet-etch without silicon nitrideBREWER SCIENCE INC·Filed 2007·Granted May 4, 2010·1 cites·40 claims
- 4060US8192642B2Spin-on protective coatings for wet-etch processing of microelectronic substratesXU GU·Filed 2007·Granted Jun 5, 2012·1 cites·9 claims
- 4159US9472436B2Multiple bonding layers for thin-wafer handlingBREWER SCIENCE INC·Filed 2014·Granted Oct 18, 2016·0 cites·10 claims
- 4259US5262195ASoluble conducting polymers and their use in manufacturing electronic devicesBREWER SCIENCE·Filed 1992·Granted Nov 16, 1993·22 cites·4 claims
- 4359US2015122426A1Multiple bonding layers for thin-wafer handlingBREWER SCIENCE INC·Filed 2014·Application pending·0 cites
- 4458US12360455B2Poly(cyanocinnamate)s for structural and optical applicationsBREWER SCIENCE INC·Filed 2020·Granted Jul 15, 2025·0 cites·28 claims
- 4556US7132216B2Non-aromatic chromophores for use in polymer anti-reflective coatingsBREWER SCIENCE INC·Filed 2003·Granted Nov 7, 2006·12 cites·9 claims
- 4656US5024922APositive working polyamic acid/imide and diazoquinone photoresist with high temperature pre-bakeMOSS MARY G·Filed 1988·Granted Jun 18, 1991·22 cites·9 claims
- 4752US6893684B2Anti-reflective coating compositions for use with low k dielectric materialsBREWER SCIENCE INC·Filed 2002·Granted May 17, 2005·3 cites·16 claims
- 4851US5368989APhotolithographic article utilizing polymers with light-absorbing properties for anti-reflective coatingBREWER SCIENCE INC·Filed 1993·Granted Nov 29, 1994·12 cites·1 claims
- 4950US2004171743A1Hybrid organic-inorganic polymer coatings with high refractive indicesTERRY BREWER PH D·Filed 2004·Application pending·0 cites
- 5048US10617010B2Polymer film stencil process for fan-out wafer-level packaging of semiconductor devicesBREWER SCIENCE INC·Filed 2017·Granted Apr 7, 2020·0 cites·23 claims
Showing the top 50 of 60 patent records by PatentIndex Score.
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