Inventor · disambiguated record
Rustam Yevtukhov
Also filed as: YEVTUKHOV RUSTAM
10 granted patents·1 pending application·134 citations·filing 1999–2019
90Inventor score
Top patents by PatentIndex Score
11 records- 0189US8835869B2Ion sources and methods for generating an ion beam with controllable ion current density distributionYEVTUKHOV RUSTAM·Filed 2012·Granted Sep 16, 2014·18 cites·15 claims
- 0287US7557362B2Ion sources and methods for generating an ion beam with a controllable ion current density distributionVEECO INSTR INC·Filed 2007·Granted Jul 7, 2009·12 cites·34 claims
- 0385US10014164B2Ion beam materials processing system with grid short clearing system for gridded ion beam sourceVEECO INSTR INC·Filed 2017·Granted Jul 3, 2018·6 cites·17 claims
- 0485US7183716B2Charged particle source and operation thereofVEECO INSTR INC·Filed 2004·Granted Feb 27, 2007·46 cites·8 claims
- 0584US10128083B2Ion sources and methods for generating ion beams with controllable ion current density distributions over large treatment areasVEECO INSTR INC·Filed 2016·Granted Nov 13, 2018·4 cites·20 claims
- 0683US7414355B2Charged particle beam extraction and formation apparatusVEECO INSTR INC·Filed 2005·Granted Aug 19, 2008·5 cites·8 claims
- 0781US8158016B2Methods of operating an electromagnet of an ion sourceHAYES ALAN V·Filed 2008·Granted Apr 17, 2012·11 cites·26 claims
- 0877US6590324B1Charged particle beam extraction and formation apparatusVEECO INSTR INC·Filed 1999·Granted Jul 8, 2003·22 cites·9 claims
- 0974US6774550B2Charged particle beam extraction and formation apparatusVEECO INSTR INC·Filed 2003·Granted Aug 10, 2004·7 cites·8 claims
- 1062US7005782B2Charged particle beam extraction and formation apparatusVEECO INSTR INC·Filed 2004·Granted Feb 28, 2006·3 cites·7 claims
- 1138US2019259559A1Plasma bridge neutralizer for ion beam etchingVEECO INSTR INC·Filed 2019·Application pending·0 cites
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Identity basis: PatentsView inventor disambiguation (2025Q4-odp release). How scoring works →