Inventor · disambiguated record

Minuru Kawamura

Also filed as: KAWAMURA MINURU

1 granted patent·0 citations·filing 2005–2005

7Inventor score

Technology areasH01J

Files withRIKEN & SII NANOTECHNOLOGY INC1

Top patents by PatentIndex Score

1 record

0134US7301159B2Charged particle beam apparatus and method of forming electrodes having narrow gap therebetween by using the sameRIKEN & SII NANOTECHNOLOGY INC·Filed 2005·Granted Nov 27, 2007·0 cites·14 claims

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