Inventor · disambiguated record
Junichi Chonan
Also filed as: CHONAN JUNICHI
4 granted patents·2 pending applications·2 citations·filing 2011–2017
61Inventor score
Top patents by PatentIndex Score
6 records- 0165US9753378B2Exposure apparatus, exposure method, and device manufacturing methodNIKON CORP·Filed 2015·Granted Sep 5, 2017·1 cites·23 claims
- 0258US9041902B2Exposure apparatus, exposure method, and device manufacturing methodCHONAN JUNICHI·Filed 2011·Granted May 26, 2015·1 cites·47 claims
- 0354US10310383B2Exposure apparatus, exposure method, and device manufacturing methodNIKON CORP·Filed 2017·Granted Jun 4, 2019·0 cites·18 claims
- 0439US9054140B2Substrate holder system, substrate holder, fastening mechanism, substrate bonding apparatus and method for manufacturing devicesSUGAYA ISAO·Filed 2012·Granted Jun 9, 2015·0 cites·30 claims
- 0537US2013057837A1Exposure apparatus, exposure method, device-manufacturing method, program, and recording mediumICHINOSE GO·Filed 2012·Application pending·0 cites
- 0635US2012214290A1Substrate holder, pair of substrate holders, substrate bonding apparatus and method for manufacturing devicesSUGAYA ISAO·Filed 2012·Application pending·0 cites
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Identity basis: PatentsView inventor disambiguation (2025Q4-odp release). How scoring works →