Inventor · disambiguated record
Karthikeyan Pillai
Also filed as: PILLAI KARTHIKEYAN
2 granted patents·1 pending application·3 citations·filing 2019–2024
38Inventor score
Files withTOKYO ELECTRON LTD3
Top patents by PatentIndex Score
3 records- 0177US10734278B2Method of protecting low-K layersTOKYO ELECTRON LTD·Filed 2019·Granted Aug 4, 2020·3 cites·20 claims
- 0257US2025308950A1Wafer processing method and system using heated functional plateTOKYO ELECTRON LTD·Filed 2024·Application pending·0 cites
- 0356US12193231B2Fabricating three-dimensional semiconductor structuresTOKYO ELECTRON LTD·Filed 2021·Granted Jan 7, 2025·0 cites·20 claims
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Identity basis: PatentsView inventor disambiguation (2025Q4-odp release). How scoring works →