Inventor · disambiguated record

Kurt F. Becker

Also filed as: BECKER KURT F

1 granted patent·10 citations·filing 2001–2001

32Inventor score

Technology areasH01J

Files withTRUSTEES STEVENS INST TECH1

Top patents by PatentIndex Score

1 record

0168US6703771B2Monochromatic vacuum ultraviolet light source for photolithography applications based on a high-pressure microhollow cathode dischargeTRUSTEES STEVENS INST TECH·Filed 2001·Granted Mar 9, 2004·10 cites·2 claims

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