Inventor · disambiguated record

Elisha Tam

Also filed as: TAM ELISHA

2 granted patents·148 citations·filing 2012–2016

70Inventor score

Technology areasH10P

Files withAPPLIED MATERIALS INC2

Top patents by PatentIndex Score

2 records

0197US10062587B2Pedestal with multi-zone temperature control and multiple purge capabilitiesAPPLIED MATERIALS INC·Filed 2016·Granted Aug 28, 2018·96 cites·18 claims
0296US9267739B2Pedestal with multi-zone temperature control and multiple purge capabilitiesAPPLIED MATERIALS INC·Filed 2012·Granted Feb 23, 2016·52 cites·14 claims

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