Inventor · disambiguated record
Robert Brennan Milligan
Also filed as: MILLIGAN ROBERT B · MILLIGAN ROBERT BRENNAN
18 granted patents·4 pending applications·5,406 citations·filing 2007–2025
97Inventor score
Top patents by PatentIndex Score
22 records- 0199US10083836B2Formation of boron-doped titanium metal films with high work functionASM IP HOLDING BV·Filed 2015·Granted Sep 25, 2018·463 cites·20 claims
- 0299US10023960B2Process gas management for an inductively-coupled plasma deposition reactorASM IP HOLDING BV·Filed 2017·Granted Jul 17, 2018·467 cites·7 claims
- 0399US9605342B2Process gas management for an inductively-coupled plasma deposition reactorASM IP HOLDING BV·Filed 2015·Granted Mar 28, 2017·479 cites·17 claims
- 0499US9412564B2Semiconductor reaction chamber with plasma capabilitiesASM IP HOLDING BV·Filed 2015·Granted Aug 9, 2016·496 cites·22 claims
- 0599US9029253B2Phase-stabilized thin films, structures and devices including the thin films, and methods of forming sameASM IP HOLDING BV·Filed 2013·Granted May 12, 2015·531 cites·11 claims
- 0699US9018111B2Semiconductor reaction chamber with plasma capabilitiesASM IP HOLDING BV·Filed 2013·Granted Apr 28, 2015·532 cites·22 claims
- 0799US7713874B2Periodic plasma annealing in an ALD-type processASM INC·Filed 2007·Granted May 11, 2010·540 cites·37 claims
- 0898US10211308B2NbMC layersASM IP HOLDING BV·Filed 2015·Granted Feb 19, 2019·412 cites·15 claims
- 0998US10087522B2Deposition of metal boridesASM IP HOLDING BV·Filed 2016·Granted Oct 2, 2018·464 cites·21 claims
- 1097US9021985B2Process gas management for an inductively-coupled plasma deposition reactorALOKOZAI FRED·Filed 2012·Granted May 5, 2015·529 cites·16 claims
- 1196US12354877B2Vapor deposition of films comprising molybdenumASM IP HOLDING BV·Filed 2021·Granted Jul 8, 2025·4 cites·24 claims
- 1296US11976361B2Methods for depositing a transition metal nitride film on a substrate by atomic layer deposition and related deposition apparatusASM IP HOLDING BV·Filed 2022·Granted May 7, 2024·2 cites·14 claims
- 1396USD698904SVacuum flange ringMILLIGAN ROBERT BRENNAN·Filed 2012·Granted Feb 4, 2014·476 cites·1 claims
- 1495US11306395B2Methods for depositing a transition metal nitride film on a substrate by atomic layer deposition and related deposition apparatusASM IP HOLDING BV·Filed 2017·Granted Apr 19, 2022·7 cites·14 claims
- 1575US10865475B2Deposition of metal borides and silicidesASM IP HOLDING BV·Filed 2016·Granted Dec 15, 2020·2 cites·21 claims
- 1673US2025279279A1Vapor deposition of films comprising molybdenumASM IP HOLDING BV·Filed 2025·Application pending·0 cites
- 1757US11233133B2NbMC layersASM IP HOLDING BV·Filed 2019·Granted Jan 25, 2022·0 cites·19 claims
- 1855US8557702B2Plasma-enhanced atomic layers deposition of conductive material over dielectric layersMILLIGAN ROBERT B·Filed 2010·Granted Oct 15, 2013·2 cites·28 claims
- 1954US2024420958A1Method, system, and apparatus for deposition of transition metal filmASM IP HOLDING BV·Filed 2024·Application pending·0 cites
- 2051US9466574B2Plasma-enhanced atomic layer deposition of conductive material over dielectric layersASM INC·Filed 2013·Granted Oct 11, 2016·0 cites·12 claims
- 2150US2021404060A1Vapor deposition of tungsten filmsASM IP HOLDING BV·Filed 2021·Application pending·0 cites
- 2241US2012100308A1Ternary metal alloys with tunable stoichiometriesMILLIGAN ROBERT B·Filed 2010·Application pending·0 cites
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Identity basis: PatentsView inventor disambiguation (2025Q4-odp release). How scoring works →