Inventor · disambiguated record
Munehisa Futamura
Also filed as: FUTAMURA MUNEHISA
3 granted patents·3 pending applications·30 citations·filing 1999–2010
69Inventor score
Top patents by PatentIndex Score
6 records- 0167US6669784B2Gas processing apparatus for object to be processedTOKYO ELECTRON LTD·Filed 2002·Granted Dec 30, 2003·11 cites·10 claims
- 0259US7582571B2Substrate processing method and recording mediumTOKYO ELECTRON LTD·Filed 2006·Granted Sep 1, 2009·2 cites·20 claims
- 0352US6372048B1Gas processing apparatus for object to be processedTOKYO ELECTRON LTD·Filed 1999·Granted Apr 16, 2002·17 cites·19 claims
- 0446US2005223987A1Film forming apparatusIWATA TERUO·Filed 2005·Application pending·0 cites
- 0546US2011180002A1Vaporizer and deposition system using the sameTOKYO ELECTRON LTD·Filed 2009·Application pending·0 cites
- 0639US2010186673A1Vaporizer, material gas supply system including vaporizer and film forming apparatus using such systemTOKYO ELECTRON LTD·Filed 2010·Application pending·0 cites
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Identity basis: PatentsView inventor disambiguation (2025Q4-odp release). How scoring works →