Inventor · disambiguated record
Kouzou Tachibana
Also filed as: TACHIBANA KOUZOU
16 granted patents·2 pending applications·66 citations·filing 1986–2023
91Inventor score
Top patents by PatentIndex Score
18 records- 0193US9687873B2Coating film forming apparatus having ring-shaped baffle member movable between processing position and retreated positionTOKYO ELECTRON LTD·Filed 2015·Granted Jun 27, 2017·10 cites·11 claims
- 0291US9070731B2Coating film forming apparatus, coating film forming method, and storage mediumTOKYO ELECTRON LTD·Filed 2014·Granted Jun 30, 2015·11 cites·4 claims
- 0389US10734255B2Substrate cleaning method, substrate cleaning system and memory mediumTOKYO ELECTRON LTD·Filed 2017·Granted Aug 4, 2020·6 cites·20 claims
- 0487US11217451B2Substrate processing method and substrate processing apparatusTOKYO ELECTRON LTD·Filed 2020·Granted Jan 4, 2022·2 cites·12 claims
- 0582US9217922B2Liquid processing apparatus, liquid processing method and storage medium for liquid processingTOKYO ELECTRON LTD·Filed 2013·Granted Dec 22, 2015·5 cites·6 claims
- 0679US4942149ACrown ether compound and separating agentAGENCY IND SCIENCE TECHN·Filed 1989·Granted Jul 17, 1990·19 cites·5 claims
- 0774US10770284B2Substrate processing method and substrate processing apparatusTOKYO ELECTRON LTD·Filed 2017·Granted Sep 8, 2020·2 cites·10 claims
- 0867US8871301B2Coating treatment apparatus, coating treatment method, and non-transitory computer storage mediumTACHIBANA KOUZOU·Filed 2012·Granted Oct 28, 2014·3 cites·8 claims
- 0963US2022059357A1Substrate processing method and substrate processing apparatusTOKYO ELECTRON LTD·Filed 2021·Application pending·0 cites
- 1055US2025087476A1Substrate processing method and substrate processing apparatusTOKYO ELECTRON LTD·Filed 2023·Application pending·0 cites
- 1149US11600500B2Substrate processing methodTOKYO ELECTRON LTD·Filed 2021·Granted Mar 7, 2023·0 cites·15 claims
- 1248US12463064B2Substrate processing method and substrate processing apparatusTOKYO ELECTRON LTD·Filed 2021·Granted Nov 4, 2025·0 cites·9 claims
- 1347US12387939B2Substrate processing methodTOKYO ELECTRON LTD·Filed 2020·Granted Aug 12, 2025·0 cites·9 claims
- 1444US5089642AOptically active carboalkylated amino alcohols and their utilization in optical resolutionDAICEL CHEM·Filed 1990·Granted Feb 18, 1992·4 cites·1 claims
- 1541US9865452B2Substrate processing method and substrate processing apparatusTOKYO ELECTRON LTD·Filed 2016·Granted Jan 9, 2018·0 cites·11 claims
- 1639US5041573AOptically active carboalkylated amino alcohols and their utilization in optical resolutionDAICEL CHEM·Filed 1989·Granted Aug 20, 1991·2 cites·13 claims
- 1738US4966985AOptically active carboalkylated amino alcohols and their utilization in optical resolutionDAICEL CHEM·Filed 1986·Granted Oct 30, 1990·2 cites·2 claims
- 1837US10867814B2Liquid processing method, substrate processing apparatus, and storage mediumTOKYO ELECTRON LTD·Filed 2017·Granted Dec 15, 2020·0 cites·17 claims
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