Inventor · disambiguated record
Young-Tong Tsai
Also filed as: TSAI YOUNG · TSAI YOUNG-TONG
5 granted patents·1 pending application·116 citations·filing 1996–2005
82Inventor score
Technology areasH10P
Top patents by PatentIndex Score
6 records- 0177US6559049B2All dual damascene oxide etch process steps in one confined plasma chamberLAM RES CORP·Filed 2002·Granted May 6, 2003·24 cites·18 claims
- 0273US6274500B1Single wafer in-situ dry clean and seasoning for plasma etching processCHARTERED SEMICONDUCTOR MFG·Filed 1999·Granted Aug 14, 2001·54 cites·16 claims
- 0360US6861362B2Self-aligned contact process implementing bias compensation etch endpoint detection and methods for implementing the sameLAM RES CORP·Filed 2001·Granted Mar 1, 2005·7 cites·19 claims
- 0452US6057240AAqueous surfactant solution method for stripping metal plasma etch deposited oxidized metal impregnated polymer residue layers from patterned metal layersCHARTERED SEMICONDUCTOR MFG·Filed 1998·Granted May 2, 2000·18 cites·15 claims
- 0545US5792708AMethod for forming residue free patterned polysilicon layers upon high step height integrated circuit substratesCHARTERED SEMICONDUCTOR MFG·Filed 1996·Granted Aug 11, 1998·13 cites·23 claims
- 0645US2005130334A1Self-aligned contact process implementing bias compensation etch endpoint detection and methods for implementing the sameLAM RES CORP·Filed 2005·Application pending·0 cites
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Identity basis: PatentsView inventor disambiguation (2025Q4-odp release). How scoring works →