Inventor · disambiguated record
Shyue-Shin Tsai
Also filed as: TSAI SHYUE-SHIN
3 granted patents·1 pending application·2 citations·filing 2013–2024
53Inventor score
Files withTAIWAN SEMICONDUCTOR MFG CO LTD4
Top patents by PatentIndex Score
4 records- 0184US11859284B2Shower head structure and plasma processing apparatus using the sameTAIWAN SEMICONDUCTOR MFG CO LTD·Filed 2019·Granted Jan 2, 2024·2 cites·20 claims
- 0278US2025122623A1Shower head structure and plasma processing apparatus using the sameTAIWAN SEMICONDUCTOR MFG CO LTD·Filed 2024·Application pending·0 cites
- 0377US12215422B2Shower head structure and plasma processing apparatus using the sameTAIWAN SEMICONDUCTOR MFG CO LTD·Filed 2023·Granted Feb 4, 2025·0 cites·20 claims
- 0439US9970105B2Method for sealing processing moduleTAIWAN SEMICONDUCTOR MFG CO LTD·Filed 2013·Granted May 15, 2018·0 cites·20 claims
Join the waitlist — get patent alerts
Get an alert when Shyue-Shin Tsai files or is granted a new patent.
We store only your email — no account needed. See our privacy policy.
Identity basis: PatentsView inventor disambiguation (2025Q4-odp release). How scoring works →