Inventor · disambiguated record
Lie Zhao
Also filed as: ZHAO LIE · ZHAO LIE LARRY
9 granted patents·6 pending applications·54 citations·filing 2000–2025
85Inventor score
Top patents by PatentIndex Score
15 records- 0192US10049921B2Method for selectively sealing ultra low-k porous dielectric layer using flowable dielectric film formed from vapor phase dielectric precursorLAM RES CORP·Filed 2014·Granted Aug 14, 2018·15 cites·19 claims
- 0287US9768063B1Dual damascene fillLAM RES CORP·Filed 2016·Granted Sep 19, 2017·5 cites·20 claims
- 0385US11914266B1Tunable optical devices with extended-depth tunable dielectric cavitiesLUMOTIVE INC·Filed 2023·Granted Feb 27, 2024·1 cites·17 claims
- 0483US2025383506A1Multicoated Tunable Optical DevicesLUMOTIVE INC·Filed 2025·Application pending·0 cites
- 0577US6500755B2Resist trim process to define small openings in dielectric layersADVANCED MICRO DEVICES INC·Filed 2000·Granted Dec 31, 2002·18 cites·23 claims
- 0673US9490211B1Copper interconnectLAM RES CORP·Filed 2015·Granted Nov 8, 2016·2 cites·17 claims
- 0770US12392967B2Multicoated tunable optical devicesLUMOTIVE INC·Filed 2023·Granted Aug 19, 2025·0 cites·31 claims
- 0869US2025044661A1Tunable optical devices with extended-depth tunable dielectric cavitiesLUMOTIVE INC·Filed 2024·Application pending·0 cites
- 0960US7737021B1Resist trim process to define small openings in dielectric layersGLOBALFOUNDRIES INC·Filed 2002·Granted Jun 15, 2010·6 cites·26 claims
- 1055US6406993B1Method of defining small openings in dielectric layersADVANCED MICRO DEVICES INC·Filed 2000·Granted Jun 18, 2002·7 cites·28 claims
- 1154US2025244634A1Metasurface devices and manufacturing using sequential single-damascene processes with protective dielectric cap layersLUMOTIVE INC·Filed 2024·Application pending·0 cites
- 1251US2025237927A1Metasurface devices with multilayer passivation coatingsLUMOTIVE INC·Filed 2024·Application pending·0 cites
- 1351US2025328004A1Stack-Integrated Metasurface Devices and Sequential Damascene Manufacturing ProcessesLUMOTIVE INC·Filed 2024·Application pending·0 cites
- 1450US12456621B2Inert gas implantation for hard mask selectivity improvementLAM RES CORP·Filed 2021·Granted Oct 28, 2025·0 cites·14 claims
- 1539US2019363048A1Via prefill in a fully aligned viaLAM RES CORP·Filed 2018·Application pending·0 cites
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