Inventor · disambiguated record
Kazuumi Tanaka
Also filed as: TANAKA KAZUUMI
5 granted patents·1 pending application·25 citations·filing 2014–2021
75Inventor score
Technology areasH10P
Top patents by PatentIndex Score
6 records- 0177USD1008986SIon shield plate for plasma processing apparatusHITACHI HIGH TECH CORP·Filed 2021·Granted Dec 26, 2023·7 cites·1 claims
- 0269USD868995SGas diffusion plate for a plasma processing apparatusHITACHI HIGH TECH CORP·Filed 2018·Granted Dec 3, 2019·13 cites·1 claims
- 0365USD958401SIon shield plate for plasma processing deviceHITACHI HIGH TECH CORP·Filed 2020·Granted Jul 19, 2022·4 cites·1 claims
- 0461US11710619B2Vacuum processing apparatusHITACHI HIGH TECH CORP·Filed 2014·Granted Jul 25, 2023·1 cites·8 claims
- 0549US11955360B2Electrostatic chuck and processing apparatusTOCALO CO LTD·Filed 2020·Granted Apr 9, 2024·0 cites·8 claims
- 0641US2014377958A1Plasma processing method and vacuum processing apparatusHITACHI HIGH TECH CORP·Filed 2014·Application pending·0 cites
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Identity basis: PatentsView inventor disambiguation (2025Q4-odp release). How scoring works →