Inventor · disambiguated record
Tejal Goyani
Also filed as: GOYANI TEJAL
3 granted patents·4 pending applications·94 citations·filing 2005–2010
75Inventor score
Top patents by PatentIndex Score
7 records- 0196US8043907B2Atomic layer deposition processes for non-volatile memory devicesAPPLIED MATERIALS INC·Filed 2010·Granted Oct 25, 2011·42 cites·15 claims
- 0293US7659158B2Atomic layer deposition processes for non-volatile memory devicesAPPLIED MATERIALS INC·Filed 2008·Granted Feb 9, 2010·25 cites·14 claims
- 0392US7910497B2Method of forming dielectric layers on a substrate and apparatus thereforAPPLIED MATERIALS INC·Filed 2007·Granted Mar 22, 2011·27 cites·22 claims
- 0448US2006062917A1Vapor deposition of hafnium silicate materials with tris(dimethylamino)silaneMUTHUKRISHNAN SHANKAR·Filed 2005·Application pending·0 cites
- 0542US2008268154A1Methods for depositing a high-k dielectric material using chemical vapor deposition processKHER SHREYAS·Filed 2007·Application pending·0 cites
- 0640US2007049043A1Nitrogen profile engineering in HI-K nitridation for device performance enhancement and reliability improvementAPPLIED MATERIALS INC·Filed 2005·Application pending·0 cites
- 0740US2006019033A1Plasma treatment of hafnium-containing materialsAPPLIED MATERIALS INC·Filed 2005·Application pending·0 cites
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